Invention Grant
- Patent Title: Mechanically anchored C4 pad and method of forming same
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Application No.: US15793130Application Date: 2017-10-25
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Publication No.: US10388617B2Publication Date: 2019-08-20
- Inventor: Erdem Kaltalioglu , Ping-Chuan Wang , Ronald Gene Filippi, Jr.
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Hoffman Warnick LLC
- Agent Anthony Canale
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L23/48 ; H01L21/308 ; H01L21/60

Abstract:
The present disclosure relates generally to flip chip technology and more particularly, to a method for fabricating a mechanically anchored controlled collapse chip connection (C4) pad on a semiconductor structure and a structure formed thereby. In an embodiment, a method is disclosed that includes forming a C4 pad on a patterned dielectric layer having grooves therein, the grooves providing an interfacial surface area between the patterned dielectric layer and the C4 pad sufficient to inhibit the C4 pad from delaminating during thermal expansion or contraction.
Public/Granted literature
- US20190123005A1 MECHANICALLY ANCHORED C4 PAD AND METHOD OF FORMING SAME Public/Granted day:2019-04-25
Information query
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