Invention Grant
- Patent Title: Methods of forming conductive and resistive circuit structures in an integrated circuit or printed circuit board
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Application No.: US14674809Application Date: 2015-03-31
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Publication No.: US10390433B2Publication Date: 2019-08-20
- Inventor: Benjamin S. Cook , Juan Alejandro Herbsommer
- Applicant: Texas Instruments Incorporated
- Applicant Address: US TX Dallas
- Assignee: Texas Instruments Incorporated
- Current Assignee: Texas Instruments Incorporated
- Current Assignee Address: US TX Dallas
- Agent Ebby Abraham; Charles A. Brill; Frank D. Cimino
- Main IPC: H05K1/16
- IPC: H05K1/16 ; H05K1/09 ; H05K3/30 ; H01L23/522 ; H01L27/08 ; H01L23/498 ; H01L21/48 ; H05K3/12

Abstract:
Described examples include methods of fabricating conductive and resistive structures by direct-write variable impedance patterning using nanoparticle-based metallization layers or chemical reaction-based deposition. In some examples, a low conductivity nanoparticle material is deposited over a surface. The nanoparticle material is selectively illuminated at different applied energy levels via illumination source power adjustments and/or scan rate adjustments for selective patterned sintering to create conductive circuit structures as well as resistive circuit structures including gradient resistive circuit structures having an electrical resistivity profile that varies along the structure length. Further examples include methods in which a non-conductive reactant layer is deposited or patterned, and a second solution is deposited in varying amounts using an additive deposition for reaction with the reactant layer to form controllably conductive structures.
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