Invention Grant
- Patent Title: Core configuration for in-situ electromagnetic induction monitoring system
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Application No.: US15726148Application Date: 2017-10-05
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Publication No.: US10391610B2Publication Date: 2019-08-27
- Inventor: Hassan G. Iravani , Kun Xu , Denis Ivanov , Shih-Haur Shen , Boguslaw A. Swedek
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Fish & Richardson P.C.
- Main IPC: B24B49/04
- IPC: B24B49/04 ; B24B49/10 ; G01N27/02 ; H01L21/66

Abstract:
An apparatus for chemical mechanical polishing includes a support for a polishing pad having a polishing surface, and an electromagnetic induction monitoring system to generate a magnetic field to monitor a substrate being polished by the polishing pad. The electromagnetic induction monitoring system includes a core and a coil wound around a portion of the core. The core includes a back portion, a center post extending from the back portion in a first direction normal to the polishing surface, and an annular rim extending from the back portion in parallel with the center post and surrounding and spaced apart from the center post by a gap. A width of the gap is less than a width of the center post, and a surface area of a top surface of the annular rim is at least two times greater than a surface area of a top surface of the center post.
Public/Granted literature
- US20180111251A1 CORE CONFIGURATION FOR IN-SITU ELECTROMAGNETIC INDUCTION MONITORING SYSTEM Public/Granted day:2018-04-26
Information query
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