- Patent Title: Electrolytic treatment apparatus and electrolytic treatment method
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Application No.: US15362159Application Date: 2016-11-28
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Publication No.: US10392719B2Publication Date: 2019-08-27
- Inventor: Tomohisa Hoshino , Masato Hamada
- Applicant: TOKYO ELECTRON LIMITED
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Abelman, Frayne & Schwab
- Priority: JP2015-236351 20151203
- Main IPC: C25D21/00
- IPC: C25D21/00 ; C25D17/00 ; H02J7/00 ; C25D5/18 ; C25D17/10 ; C25D21/12 ; C25D3/38 ; H02J7/34

Abstract:
An electrolytic treatment apparatus of the present disclosure includes a common electrode and a counter electrode that are disposed such that the treatment liquid is interposed therebetween. A first wiring and a second wiring are connected to the common electrode, a capacitor is provided in the first wiring. Copper ions are moved to the counter electrode side by forming an electric field in the treatment liquid when the capacitor is charged without connecting the first wiring and the second wiring to each other, and the copper ions moved to the counter electrode side are reduced by applying a voltage between the common electrode and the counter electrode when the capacitor is discharged by connecting the first wiring and the second wiring to each other.
Public/Granted literature
- US20170159202A1 ELECTROLYTIC TREATMENT APPARATUS AND ELECTROLYTIC TREATMENT METHOD Public/Granted day:2017-06-08
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