Invention Grant
- Patent Title: Optical vortex coronagraph scatterometer
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Application No.: US15698238Application Date: 2017-09-07
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Publication No.: US10393643B2Publication Date: 2019-08-27
- Inventor: Grover A. Swartzlander, Jr.
- Applicant: Grover A. Swartzlander, Jr.
- Applicant Address: US NY Rochester
- Assignee: Rochester Institute of Technology
- Current Assignee: Rochester Institute of Technology
- Current Assignee Address: US NY Rochester
- Agency: Bond, Schoeneck & King, PLLC
- Agent Joseph Noto
- Main IPC: G01N15/14
- IPC: G01N15/14

Abstract:
An optical vortex coronagraph scatterometer including a light source of wavelength λ, a scattering cell in optical communication with the light source, a circular aperture having a radius R at a distance d from the scattering cell in optical communication with the light source, a pivot point between the circular aperture and the scattering cell allowing relative movement of the light source and the scattering cell with respect to the circular aperture, a first lens at a focal length f1 between the circular aperture and an optical vortex element, and a second lens at a focal length f2 between the optical vortex element and a detector; and method for determining a scattering spectra at low and zero angles is disclosed.
Public/Granted literature
- US20180067036A1 Optical Vortex Coronagraph Scatterometer Public/Granted day:2018-03-08
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