公开(公告)号：US10393643B2

公开(公告)日：2019-08-27

申请号：US15698238

申请日：2017-09-07

Applicant: Grover A. Swartzlander, Jr.

Inventor： Grover A. Swartzlander, Jr.

IPC: G01N15/14

Abstract: An optical vortex coronagraph scatterometer including a light source of wavelength λ, a scattering cell in optical communication with the light source, a circular aperture having a radius R at a distance d from the scattering cell in optical communication with the light source, a pivot point between the circular aperture and the scattering cell allowing relative movement of the light source and the scattering cell with respect to the circular aperture, a first lens at a focal length f1 between the circular aperture and an optical vortex element, and a second lens at a focal length f2 between the optical vortex element and a detector; and method for determining a scattering spectra at low and zero angles is disclosed.