Invention Grant
- Patent Title: Optical element having a coating for influencing heating radiation and optical arrangement
-
Application No.: US15405012Application Date: 2017-01-12
-
Publication No.: US10401540B2Publication Date: 2019-09-03
- Inventor: Boris Bittner , Norbert Wabra , Holger Schmidt , Ricarda Schoemer , Sonja Schneider
- Applicant: Carl Zeiss SMT GmbH
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102014216458 20140819
- Main IPC: G02B5/08
- IPC: G02B5/08 ; G02B27/00 ; G02B7/18 ; G03F7/20 ; G02B5/30 ; G21K1/06

Abstract:
The disclosure relates to an optical element, including: a substrate, a first coating, which is disposed on a first side of the substrate and is configured for reflecting radiation having a used wavelength (λEUV) in the EUV wavelength range, and a second coating, which is disposed on a second side of the substrate, for influencing heating radiation that is incident on the second side of the substrate. The disclosure also relates to an optical arrangement having at least one such optical element.
Public/Granted literature
- US20170123118A1 OPTICAL ELEMENT HAVING A COATING FOR INFLUENCING HEATING RADIATION AND OPTICAL ARRANGEMENT Public/Granted day:2017-05-04
Information query