Invention Grant
- Patent Title: Generating risk inventory and common process window for adjustment of manufacturing tool
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Application No.: US15719680Application Date: 2017-09-29
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Publication No.: US10401837B2Publication Date: 2019-09-03
- Inventor: Hongxin Zhang , Shaowen Gao , Norman Chen
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Hoffman Warnick LLC
- Agent Anthony Canale
- Main IPC: G05B19/418
- IPC: G05B19/418 ; G06F17/50

Abstract:
A method disclosed herein includes: converting an image of a manufactured circuit to a plurality of representative contours, the plurality of representative contours corresponding to printed features in the manufactured circuit; generating a risk inventory for the manufactured circuit based on the plurality of representative contours, the risk inventory being configured to identify at least one process sensitive geometry (PSG) in the manufactured circuit; generating a common process window (CPW) for the manufactured circuit based on the plurality of representative contours and the risk inventory, the CPW being indicative of manufacturing reliability of each feature in the manufactured circuit; and generating instructions to adjust a manufacturing tool for creating the manufactured circuit, based on the generated CPW.
Public/Granted literature
- US20190101905A1 GENERATING RISK INVENTORY AND COMMON PROCESS WINDOW FOR ADJUSTMENT OF MANUFACTURING TOOL Public/Granted day:2019-04-04
Information query
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