Invention Grant
- Patent Title: Heterogeneous polynuclear complex for use in the chemical deposition of composite metal or metal compound thin films
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Application No.: US15558011Application Date: 2016-05-09
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Publication No.: US10407450B2Publication Date: 2019-09-10
- Inventor: Ryosuke Harada , Toshiyuki Shigetomi , Shunichi Nabeya , Kazuharu Suzuki , Akiko Kumakura , Tatsutaka Aoyama , Takayuki Sone
- Applicant: TANAKA KIKINZOKU KOGYO K.K.
- Applicant Address: JP Tokyo
- Assignee: TANAKA KIKINZOKU KOGYO K.K.
- Current Assignee: TANAKA KIKINZOKU KOGYO K.K.
- Current Assignee Address: JP Tokyo
- Agency: Orrick, Herrington & Sutcliffe LLP
- Agent Joseph A. Calvaruso
- Priority: JP2015-096980 20150512
- International Application: PCT/JP2016/063694 WO 20160509
- International Announcement: WO2016/181917 WO 20161117
- Main IPC: C07F13/00
- IPC: C07F13/00 ; C07F15/00 ; C23C16/16 ; C07F15/06 ; C07F19/00 ; C07C251/08 ; C23C16/18 ; H01L21/285 ; H01L21/31 ; C23C16/06 ; C23C16/46 ; H01L21/02

Abstract:
A heterogeneous polynuclear complex for use as a raw material in the chemical deposition of composite metal or composite metal thin films with the below formula. In the formula, M1 and M2 are mutually different transition metals, x is an integer of 0 or more and 2 or less, y is in integer of 1 or more and 2 or less, z is an integer of 1 or more and 10 or less, R1 to R4 are each one of a hydrogen atom and an alkyl group with a carbon number of 1 or more and 5 or less, and R5 is a hydrogen atom, a carbonyl, an alkyl group with a carbon number of 1 or more and 7 or less, an allyl group or an allyl derivative. The heterogeneous polynuclear complex allows a composite metal thin film or a composite metal compound thin film containing a plurality of metals to be formed from a single raw material.
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