Invention Grant
- Patent Title: Cooling system, substrate processing system and flow rate adjusting method for cooling medium
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Application No.: US15856629Application Date: 2017-12-28
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Publication No.: US10415899B2Publication Date: 2019-09-17
- Inventor: Nobuaki Tanabe
- Applicant: ASM IP Holding B.V.
- Applicant Address: NL Almere
- Assignee: ASM IP Holding B.V.
- Current Assignee: ASM IP Holding B.V.
- Current Assignee Address: NL Almere
- Agency: Studebaker & Brackett PC
- Main IPC: F28F13/06
- IPC: F28F13/06 ; F28F27/00 ; H01J37/32 ; C23C16/46 ; H01L21/67 ; G01F1/32 ; G01F1/684 ; F28D9/00

Abstract:
Examples of a cooling system include a flow channel through which a cooling medium flows, a valve that is provided in the flow channel and configured to adjusts a flow rate of the cooling medium, a thermometer for measuring temperature of the cooling medium, a flowmeter for measuring a flow rate of the cooling medium passing through the valve, and a controller for determining cooling capacity of the cooling medium from measurement results of the thermometer and the flowmeter, and adjusting the valve so that the cooling capacity of the cooling medium approaches to a target value when the determined cooling capacity is different from the target value.
Public/Granted literature
- US20190204029A1 COOLING SYSTEM, SUBSTRATE PROCESSING SYSTEM AND FLOW RATE ADJUSTING METHOD FOR COOLING MEDIUM Public/Granted day:2019-07-04
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