公开(公告)号：US20230389134A1

公开(公告)日：2023-11-30

申请号：US18201601

申请日：2023-05-24

Applicant: ASM IP Holding B.V.

Inventor： ChangMin Lee ,  Joaquin Aguilar Santillan ,  Nobuaki Tanabe ,  Hong Gao ,  Shanker Kuttath

IPC: H05B3/28 ,  C04B35/581 ,  C04B35/645 ,  C04B37/02 ,  H01L21/687

CPC classification number: H05B3/283 ,  C04B35/581 ,  C04B35/645 ,  C04B37/023 ,  H01L21/68757 ,  C04B2235/3865 ,  C04B2235/3206 ,  C04B2235/3222 ,  C04B2235/612 ,  C04B2237/366 ,  C04B2237/40 ,  C04B2237/80 ,  H05B2203/016 ,  H05B2203/017

Abstract: A method of manufacturing a heating block includes a first step of providing a ceramic material to a mold, a second step of sintering the ceramic material and forming a plate, and a third step of machining the plate. A shaft is connected to the plate in a fourth step, and rods are bonded to the plate in a fifth step of the method. Heating blocks and semiconductor processing systems having heating blocks are also described.

公开(公告)号：US20240352587A1

公开(公告)日：2024-10-24

申请号：US18635185

申请日：2024-04-15

Applicant: ASM IP Holding B.V.

Inventor： Nobuaki Tanabe

IPC: C23C16/458 ,  H02N13/00

CPC classification number: C23C16/4586 ,  H02N13/00

Abstract: A substrate processing apparatus including an electrostatic chuck includes a lower electrode, an upper electrode, a first AC power supply, a first filter circuit connected to the heater, an isolation transformer connected to the heater through the first filter circuit, a second AC power supply connected to the isolation transformer, an internal electrode provided in the lower electrode, a second filter circuit, and a DC power supply, in which the DC power supply is driven under constant current control, and a secondary coil of the isolation transformer is electrically floating.

公开(公告)号：US10415899B2

公开(公告)日：2019-09-17

申请号：US15856629

申请日：2017-12-28

Applicant: ASM IP Holding B.V.

Inventor： Nobuaki Tanabe

IPC: F28F13/06 ,  F28F27/00 ,  H01J37/32 ,  C23C16/46 ,  H01L21/67 ,  G01F1/32 ,  G01F1/684 ,  F28D9/00

Abstract: Examples of a cooling system include a flow channel through which a cooling medium flows, a valve that is provided in the flow channel and configured to adjusts a flow rate of the cooling medium, a thermometer for measuring temperature of the cooling medium, a flowmeter for measuring a flow rate of the cooling medium passing through the valve, and a controller for determining cooling capacity of the cooling medium from measurement results of the thermometer and the flowmeter, and adjusting the valve so that the cooling capacity of the cooling medium approaches to a target value when the determined cooling capacity is different from the target value.