Invention Grant
- Patent Title: Process for the formation of a graphene membrane component, graphene membrane component, microphone and hall-effect sensor
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Application No.: US16183192Application Date: 2018-11-07
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Publication No.: US10421665B2Publication Date: 2019-09-24
- Inventor: Guenther Ruhl , Matthias Koenig
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: INFINEON TECHNOLOGIES AG
- Current Assignee: INFINEON TECHNOLOGIES AG
- Current Assignee Address: DE Neubiberg
- Agency: Slater Matsil, LLP
- Priority: DE102017100894 20170118
- Main IPC: C01B32/194
- IPC: C01B32/194 ; G01R33/07 ; B81C1/00 ; H04R19/01

Abstract:
A process for the formation of a graphene membrane component includes arranging a graphene membrane in a relaxed condition of the graphene membrane on a surface of a supportive substrate. The graphene membrane extends across a cut-out with an opening at the surface of the supportive substrate. The graphene membrane is moreover arranged so that a first portion of the graphene membrane is arranged on the surface of the supportive substrate and a second portion of the graphene membrane is arranged over the opening of the cut-out. The process further includes tensioning of the second portion of the graphene membrane, in order to convert the second portion of the graphene membrane to a tensioned condition, so that the second portion of the graphene membrane is permanently in the tensioned condition in an operating temperature range of the graphene membrane component.
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