As a former correction step, a coordinate correction method includes: a step of setting a measuring probe in a drive mechanism; a step of restraining a measurement tip; a step of acquiring a moving amount and a probe output; and a step of generating a former correction matrix including linear correction elements and non-linear correction elements. As a latter correction step, the coordinate correction method includes: a step of setting a measuring probe in a drive mechanism; a step of restraining a measurement tip; a step of acquiring a moving amount and a probe output; a step of generating an intermediate correction matrix including linear correction elements for correcting the probe output; and a step of correcting the probe output with a latter correction matrix. Consequently, correction can be simplified while allowing for correction of a non-linear error of the probe output supplied from the measuring probe.