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1.发明授权公开(公告)号：US09683839B2
公开(公告)日：2017-06-20
申请号：US14732056
申请日：2015-06-05
Applicant: MITUTOYO CORPORATION
Inventor： Hideyuki Nakagawa , Nobuhiro Ishikawa
CPC classification number: G01B21/045 , G01B5/008
Abstract: In a shape measuring apparatus having a scanning probe to perform scanning measurement using a tip ball provided at an end of a stylus with the tip ball being in contact with an object to be measured, a tip ball displacement detector detects a displacement of the tip ball of the scanning probe, a displacement of a moving mechanism that relatively moves the object to be measured and the scanning probe is detected, and an angle formed by a contact direction of the tip ball with the object to be measured and an axial direction of the stylus is calculated. The displacement of the tip ball that is detected by the tip ball displacement detector is corrected on the basis of the angle, and a corrected value of the displacement is outputted. The corrected value is added to the displacement of the moving mechanism to calculate a measurement value.
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公开(公告)号：US10429167B2
公开(公告)日：2019-10-01
申请号：US15682904
申请日：2017-08-22
Applicant: MITUTOYO CORPORATION
Inventor： Hideyuki Nakagawa , Nobuhiro Ishikawa
Abstract: As a former correction step, a coordinate correction method includes: a step of setting a measuring probe in a drive mechanism; a step of restraining a measurement tip; a step of acquiring a moving amount and a probe output; and a step of generating a former correction matrix including linear correction elements and non-linear correction elements. As a latter correction step, the coordinate correction method includes: a step of setting a measuring probe in a drive mechanism; a step of restraining a measurement tip; a step of acquiring a moving amount and a probe output; a step of generating an intermediate correction matrix including linear correction elements for correcting the probe output; and a step of correcting the probe output with a latter correction matrix. Consequently, correction can be simplified while allowing for correction of a non-linear error of the probe output supplied from the measuring probe.
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公开(公告)号：US10422636B2
公开(公告)日：2019-09-24
申请号：US15681926
申请日：2017-08-21
Applicant: MITUTOYO CORPORATION
Inventor： Hideyuki Nakagawa , Nobuhiro Ishikawa
Abstract: A processing device includes: a pushing drive mechanism control unit that brings a measurement tip into contact with a surface of a calibration artifact at a single point in each of five directions are all normal directions to the surface of the calibration artifact; a scanning drive mechanism control unit that reciprocates the measurement tip on the surface of the calibration artifact on each of three planes perpendicular to one another; a coordinate acquisition unit that acquires a moving amount and a probe output of a measuring probe; a matrix generation unit that generates a correction matrix; and a probe output correction unit that corrects the probe output with the correction matrix. This enables an improvement in asymmetric probe characteristics of the probe output, which is outputted from the measuring probe, in a particular plane. Thus, shape coordinates of an object to be measured can be obtained with high accuracy.
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公开(公告)号：US10006803B2
公开(公告)日：2018-06-26
申请号：US14740707
申请日：2015-06-16
Applicant: MITUTOYO CORPORATION
Inventor： Nobuhiro Ishikawa
IPC: G01H11/08 , G01B7/012 , G06F3/0354 , G06F3/043 , H03K5/08
CPC classification number: G01H11/08 , G01B7/012 , G06F3/03545 , G06F3/0433 , H03K5/088
Abstract: A contact detector circuit that detects a change in a DC sensor signal based on a change in a physical amount to be detected includes: a reference signal generation circuit that generates a reference signal based on the DC sensor signal; a trigger signal output circuit that compares the DC sensor signal with the reference signal and outputs a trigger signal based on a result of the comparison; and a sampling-and-holding circuit that holds the reference signal when the trigger signal is started to be outputted and outputs the held reference signal to the trigger signal output circuit while the trigger signal is outputted. The trigger signal output circuit uses the reference signal outputted by the sampling-and-holding circuit for the comparison with the DC sensor signal while the trigger signal is outputted.
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5.发明授权公开(公告)号：US09062958B2
公开(公告)日：2015-06-23
申请号：US13733434
申请日：2013-01-03
Applicant: MITUTOYO CORPORATION
Inventor： Kazuhiko Hidaka , Nobuhiro Ishikawa
CPC classification number: G01B9/02041 , G01B5/012 , G01B11/007 , G01B11/272
Abstract: A line image sensor including a light receiving plane on which two or more straight rows of pixels are disposed, the straight rows of pixels capturing images of regular fringes generated from light reflected from an irradiated body in accordance with the amount of light received by each pixel; at least two rows of pixels acquiring images of linear fringes crossing at right angles in two directions among the fringe projected onto the light receiving plane.
Abstract translation: 一种线形图像传感器，包括其上设置有两个或更多个直线像素的光接收平面，所述直线像素捕获根据由每个像素接收的光量的从照射体反射的光产生的规则条纹的图像 ; 至少两行像素获取在投影到光接收平面上的条纹中的两个方向上以直角交叉的线形条纹的图像。
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Patent Agency Ranking
公开(公告)号：US09746303B2
公开(公告)日：2017-08-29
申请号：US14621926
申请日：2015-02-13
Applicant: MITUTOYO CORPORATION
Inventor： Hideyuki Nakagawa , Nobuhiro Ishikawa
CPC classification number: G01B5/008 , G01B21/042 , G01B21/045
Abstract: A first correction component calculation processing unit calculates diagonal components of a correction matrix based on first and second detection values. The first and second detection values are obtained by measurement in which a calibration reference body and the probe are moved relatively to each other in a normal direction on a surface of the calibration reference body so as to bring a measurement tip into contact with the surface of the calibration reference body at one point. A second correction component calculation processing unit calculates non-diagonal components of the correction matrix based on third and fourth detection values. The third and fourth detection values are obtained by scanning measurement using the measurement tip on the surface of the calibration reference body while maintaining a constant relative distance between the center of the measurement tip and a reference point or a reference line of the calibration reference body.
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公开(公告)号：US20160131470A1
公开(公告)日：2016-05-12
申请号：US14929588
申请日：2015-11-02
Applicant: MITUTOYO CORPORATION
Inventor： Nobuhiro Ishikawa , Hideyuki Nakagawa
IPC: G01B5/008
CPC classification number: G01B21/045
Abstract: A form measuring machine includes: a scanning probe including a stylus with a tip ball and a probe body attached with the stylus; a movable slider supporting the scanning probe; a scale detecting a slider displacement of the slider; a tip ball displacement detector detecting a tip ball displacement of the tip ball; and an arithmetic unit calculating a measurement value based on the slider displacement, the tip ball displacement and a correction filter and comprising a correction filter setting section that: calculates a correction matrix diagonal component from the slider displacement and the tip ball displacement detected by calibration of the scanning probe; and calculates a correction factor of the correction filter from the correction matrix diagonal component to set the correction filter.
Abstract translation: 一种形状测量机包括：扫描探头，其包括具有尖端球的触针和附接有触针的探针主体; 支撑扫描探针的可移动滑块; 检测滑块的滑块位移的刻度; 检测尖端球的尖端球位移的尖端球位移检测器; 以及算术单元，其基于所述滑块位移，所述尖端球位移和校正滤波器来计算测量值，并且包括校正滤波器设置部分，其从所述滑块位移和通过校准检测到的所述尖端球位移计算校正矩阵对角线分量 扫描探针; 并从校正矩阵对角线分量计算校正滤波器的校正因子，以设置校正滤波器。
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公开(公告)号：US10415949B2
公开(公告)日：2019-09-17
申请号：US15440280
申请日：2017-02-23
Applicant: MITUTOYO CORPORATION
Inventor： Satoshi Koga , Akinori Saito , Hiroyuki Kanamori , Yutaka Kuriyama , Nobuhiro Ishikawa
Abstract: A measuring probe includes two supporting members, each having a rotationally symmetric shape and allowing for an attitude change of a stylus, in an axial direction of a probe housing. Four detection elements are disposed at fourfold symmetric positions in one of the two supporting members that includes four deformable arm parts. A signal processing circuit includes a first processing part that processes outputs of the detection elements to output three displacement signals representing displacement components of a contact part in mutually perpendicular three directions, respectively. The measuring probe capable of reducing measurement directional dependency of sensitivity with a simple configuration while maintaining high sensitivity is thus provided.
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公开(公告)号：US10393495B2
公开(公告)日：2019-08-27
申请号：US15440440
申请日：2017-02-23
Applicant: MITUTOYO CORPORATION
Inventor： Satoshi Koga , Akinori Saito , Hiroyuki Kanamori , Yutaka Kuriyama , Nobuhiro Ishikawa
Abstract: A measuring probe includes: a stylus having a contact part to be brought into contact with an object to be measured; a probe housing capable of supporting the stylus on an axial center; and a detection element capable of detecting a movement of the contact part. The measuring probe further includes: two supporting members disposed in an axial direction of the probe housing, the supporting member allowing for an attitude change of the stylus; and a coupling shaft for coupling the two supporting members together. The detection element is disposed in one of the two supporting members that is farthest away from a rotational center position of rotation generated in the stylus when a measuring force is applied to the contact part from a direction perpendicular to the axial direction, to detect a strain amount of the one of the two supporting members.
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10.发明授权公开(公告)号：US09091522B2
公开(公告)日：2015-07-28
申请号：US13971235
申请日：2013-08-20
Applicant: MITUTOYO CORPORATION
Inventor： Hideyuki Nakagawa , Nobuhiro Ishikawa
CPC classification number: G01B5/008 , G01B21/045
Abstract: A shape measuring machine includes a slider that supports a scanning probe. A scale unit detects a displacement of the slider. A tip sphere displacement detection unit detects a displacement of the tip sphere. A calculation unit includes a correction filter including a first and second filters and an adder, and calculates a measurement value from the displacements of the slider and the tip sphere. The first filter corrects the displacement of the slider based on a frequency transfer characteristic from the scale unit to the tip of the slider. The second filter outputs a value that is obtained by correcting a value corrected by the first filter based on a frequency transfer characteristic from the tip of the slider to the tip sphere as the correction value. The adder outputs a measurement value obtained by adding the correction value and the displacement of the tip sphere.
Abstract translation: 形状测量机包括支撑扫描探针的滑块。 刻度单元检测滑块的位移。 尖端球体位移检测单元检测尖端球体的位移。 计算单元包括具有第一和第二滤波器的校正滤波器和加法器，并且根据滑块和尖端球体的位移来计算测量值。 第一个滤波器基于从刻度单元到滑块的尖端的频率传递特性来校正滑块的位移。 第二滤波器输出通过基于从滑块的尖端到尖端球的频率传递特性来校正由第一滤波器校正的值而获得的值作为校正值。 加法器输出通过将校正值和尖端球体的位移相加而获得的测量值。
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