- Patent Title: Plasma treatment system including cover plate to insulate window
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Application No.: US15180877Application Date: 2016-06-13
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Publication No.: US10431432B2Publication Date: 2019-10-01
- Inventor: Jongwoo Sun , Hakyoung Kim
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Agency: Sughrue Mion, PLLC
- Priority: KR10-2015-0112533 20150810
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H01L21/3065
Abstract:
A cover plate, a plasma treatment system, and a plasma treatment method therewith are disclosed. The plasma treatment system may include a window, an antenna electrode disposed on the window, and a cover plate disposed between the antenna electrode and the window to cover top and side surfaces of the window.
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