Invention Grant
- Patent Title: Detecting an arc occuring during supplying power to a plasma process
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Application No.: US15626273Application Date: 2017-06-19
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Publication No.: US10431437B2Publication Date: 2019-10-01
- Inventor: Cezary Gapi{right arrow over (n)}ski , Andrzej Gieraltowski , Adam Grabowski , Piotr Lach , Marcin Zelechowski
- Applicant: TRUMPF Huettinger Sp. z o. o.
- Applicant Address: PL Zielonka
- Assignee: TRUMPF Huettinger Sp. z o. o.
- Current Assignee: TRUMPF Huettinger Sp. z o. o.
- Current Assignee Address: PL Zielonka
- Agency: Fish & Richardson P.C.
- Priority: EP14461600 20141219
- Main IPC: H01J37/32
- IPC: H01J37/32

Abstract:
Methods, apparatus and systems for detecting an arc during supplying a plasma process in a plasma chamber with a power are provided. An example plasma power supply includes: a DC source, an output signal generator, a first signal sequence measurement device for measuring a first signal sequence present between the DC source and the output signal generator, a second signal sequence measurement device for measuring a second signal sequence present at an output of the output signal generator, and a controller configured to generate a reference signal sequence based on one of the first and second signal sequences, to compare the reference signal sequence and the other of the first and second signal sequences that has not been used to determine the reference signal sequence, and to generate a detection signal if the reference signal sequence and the other of the first and second signal sequences cross.
Public/Granted literature
- US20170287684A1 DETECTING AN ARC OCCURING DURING SUPPLYING POWER TO A PLASMA PROCESS Public/Granted day:2017-10-05
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