公开(公告)号：US20240421604A1

公开(公告)日：2024-12-19

申请号：US18814669

申请日：2024-08-26

Applicant: TRUMPF Huettinger Sp. Z O. O.

Inventor： Andrzej Klimczak ,  Andrzej Gieraltowski ,  Michal Balcerak

IPC: H02J3/46 ,  H02J7/00 ,  H02P9/02

Abstract: A high power (HP) generator includes a plurality of low power (LP) generators, a coupling in which the plurality of LP generators is electrically connected, and a control unit. During operation, a coupling-value at an output of the coupling is higher than an LP-generator-value at an output of one of the plurality of LP generators. The control unit is configured to select a contribution of each LP generator to an output value of the HP generator, in a way that one or a combination of following is accomplished: (i) the output of the coupling and/or the output of the HP generator is a step function, (ii) the plurality of LP generators is activated sequentially during a pulse, (iii) at least one amplitude step is lower than 1 kV, and (iv) the plurality of LP generators is connected by switching only.

公开(公告)号：US20240420922A1

公开(公告)日：2024-12-19

申请号：US18814717

申请日：2024-08-26

Applicant: TRUMPF Huettinger Sp. Z O. O.

Inventor： Andrzej Klimczak ,  Andrzej Gieraltowski ,  Michal Balcerak

IPC: H01J37/32

Abstract: A high power (HP) generator includes a plurality of low power (LP) generators, a coupling in which the plurality of LP generators is electrically connected, and a control unit. During operation, at least in some states of the HP generator, a coupling-value at an output of the coupling is higher than an LP-generator-value at an output of one of the plurality of LP generators. The control unit is configured to select a respective contribution of each of the plurality of LP generators in order to generate a rise and/or a decay of a pulse at the output of the coupling. The HP generator further includes a respective damping circuit positioned between each pair of adjacent LP generators of the plurality of LP generators in an open chain configuration. The damping circuit includes a resistor and/or an inductor.

公开(公告)号：US20170287684A1

公开(公告)日：2017-10-05

申请号：US15626273

申请日：2017-06-19

Applicant: TRUMPF Huettinger Sp. z o. o.

Inventor： Cezary Gapiñski ,  Andrzej Gieraltowski ,  Adam Grabowski ,  Piotr Lach ,  Marcin Zelechowski

IPC: H01J37/32

CPC classification number: H01J37/32944

Abstract: Methods, apparatus and systems for detecting an arc during supplying a plasma process in a plasma chamber with a power are provided. An example plasma power supply includes: a DC source, an output signal generator, a first signal sequence measurement device for measuring a first signal sequence present between the DC source and the output signal generator, a second signal sequence measurement device for measuring a second signal sequence present at an output of the output signal generator, and a controller configured to generate a reference signal sequence based on one of the first and second signal sequences, to compare the reference signal sequence and the other of the first and second signal sequences that has not been used to determine the reference signal sequence, and to generate a detection signal if the reference signal sequence and the other of the first and second signal sequences cross.

公开(公告)号：US20250006463A1

公开(公告)日：2025-01-02

申请号：US18815903

申请日：2024-08-27

Applicant: TRUMPF Huettinger Sp. Z O. O.

Inventor： Andrzej Klimczak ,  Andrzej Gieraltowski ,  Michal Balcerak

IPC: H01J37/32

Abstract: A high power (HP) generator includes a plurality of low power (LP) generators, a coupling in which the plurality of LP generators is electrically connected, and a control unit. During operation, at least in some states of the HP generator, a coupling-value at an output of the coupling is higher than an LP-generator-value at an output of one of the plurality of LP generators. The control unit is configured to select a respective contribution of each of the plurality of LP generators in order to generate a rise and/or a decay of a pulse at the output of the coupling. The HP generator is at least partially directly liquid cooled, by being immersed in a dielectric cooling liquid.

公开(公告)号：US20240429025A1

公开(公告)日：2024-12-26

申请号：US18817255

申请日：2024-08-28

Applicant: TRUMPF Huettinger Sp. z o. o.

Inventor： Andrzej Klimczak ,  Andrzej Gieraltowski ,  Michal Balcerak

IPC: H01J37/32

Abstract: A high power (HP) generator includes a plurality of low power (LP) generators, a coupling in which the LP generators are electrically connected, and a control unit. During operation, at least in some states of the HP generator, a coupling-value at an output of the coupling is higher than an LP-generator-value at an output of one of the LP generators. The control unit is configured to select a respective contribution of each LP generator in order to generate a rise and/or a decay of a pulse at the output of the coupling. A charging energy of the LP generators is supplied over a transformer with a primary winding and a secondary winding for each LP generator. The secondary winding is connected to a rectifier, which is connected to the energy storage component of the corresponding LP generator, and/or a plurality of the primary windings is connected in series.

公开(公告)号：US20240429021A1

公开(公告)日：2024-12-26

申请号：US18817265

申请日：2024-08-28

Applicant: TRUMPF Huettinger Sp. z o. o.

Inventor： Andrzej Klimczak ,  Andrzej Gieraltowski ,  Michal Balcerak

IPC: H01J37/24 ,  H01J37/248

Abstract: A high power (HP) generator includes a plurality of low power (LP) generators, a coupling in which the plurality of LP generators is electrically connected, and a control unit. During operation, at least in some states of the HP generator, a coupling-value at an output of the coupling is higher than an LP-generator-value at an output of one of the plurality of LP generators. The control unit is configured to select a respective contribution of each of the plurality of LP generators in order to generate a rise and/or a decay of a pulse at the output of the coupling. The control unit further includes switching units, having a current rise capability of at least 10 A/μs, and/or having a capability of withstanding a voltage of at least 0.5 kV with voltage rise and fall rates of at least 15 kV/μs.

公开(公告)号：US10431437B2

公开(公告)日：2019-10-01

申请号：US15626273

申请日：2017-06-19

Applicant: TRUMPF Huettinger Sp. z o. o.

Inventor： Cezary Gapi{right arrow over (n)}ski ,  Andrzej Gieraltowski ,  Adam Grabowski ,  Piotr Lach ,  Marcin Zelechowski

IPC: H01J37/32

Abstract: Methods, apparatus and systems for detecting an arc during supplying a plasma process in a plasma chamber with a power are provided. An example plasma power supply includes: a DC source, an output signal generator, a first signal sequence measurement device for measuring a first signal sequence present between the DC source and the output signal generator, a second signal sequence measurement device for measuring a second signal sequence present at an output of the output signal generator, and a controller configured to generate a reference signal sequence based on one of the first and second signal sequences, to compare the reference signal sequence and the other of the first and second signal sequences that has not been used to determine the reference signal sequence, and to generate a detection signal if the reference signal sequence and the other of the first and second signal sequences cross.