Invention Grant
- Patent Title: Semiconductor memory device
-
Application No.: US16012285Application Date: 2018-06-19
-
Publication No.: US10438959B2Publication Date: 2019-10-08
- Inventor: Tatsuya Kato , Atsushi Murakoshi , Fumitaka Arai
- Applicant: Toshiba Memory Corporation
- Applicant Address: JP Minato-ku
- Assignee: Toshiba Memory Corporation
- Current Assignee: Toshiba Memory Corporation
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2017-058210 20170323
- Main IPC: H01L29/76
- IPC: H01L29/76 ; H01L27/11521 ; H01L27/11556 ; H01L27/11519 ; H01L27/11524 ; H01L27/11548

Abstract:
A semiconductor memory device includes a first electrode film and a second electrode film spreading along a first direction and a second direction, first insulating plates intermittently disposed along the first direction and each of two columns separated in the second direction from each other, second insulating plates provided between the two columns, intermittently disposed along the first direction and each of n columns, third insulating plates provided between one of the two columns and a column formed of the second insulating plates, intermittently disposed along the first direction, a first insulating member provided between the first insulating plate and the third insulating plate, and a second insulating member provided between the second insulating plate and the third insulating plate. The first electrode film is divided into two parts between the two columns. The second electrode film is divided into {(n+1)×2} parts between the two columns.
Public/Granted literature
- US20180301461A1 SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2018-10-18
Information query
IPC分类: