Invention Grant
- Patent Title: Memory arrays, and methods of forming memory arrays
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Application No.: US15933218Application Date: 2018-03-22
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Publication No.: US10438962B2Publication Date: 2019-10-08
- Inventor: Changhan Kim
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Wells St. John P.S.
- Main IPC: H01L27/11
- IPC: H01L27/11 ; H01L27/1157 ; H01L27/11565 ; H01L21/762 ; H01L27/11582 ; H01L29/51

Abstract:
Some embodiments include an assembly having a channel to conduct current. The channel includes a first channel portion and a second channel portion. A first memory cell structure is between a first gate and the first channel portion. The first memory cell structure includes a first charge-storage region and a first charge-blocking region. A second memory cell structure is between a second gate and the second channel portion. The second memory cell structure includes a second charge-storage region and a second charge-blocking region. The first and second charge-blocking regions include silicon oxynitride. A void is located between the first and second gates, and between the first and second memory cell structures. Some embodiments include memory arrays (e.g., NAND memory arrays), and some embodiments include methods of forming memory arrays.
Public/Granted literature
- US20190198510A1 Memory Arrays, and Methods of Forming Memory Arrays Public/Granted day:2019-06-27
Information query
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