Invention Grant
- Patent Title: Semiconductor device
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Application No.: US16034456Application Date: 2018-07-13
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Publication No.: US10439074B2Publication Date: 2019-10-08
- Inventor: Shunpei Yamazaki , Kenichi Okazaki , Masashi Tsubuku , Satoru Saito , Noritaka Ishihara
- Applicant: Semiconductor Energy Laboratory Co., Ltd.
- Applicant Address: JP Atsugi-shi, Kanagawa-ken
- Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee Address: JP Atsugi-shi, Kanagawa-ken
- Agency: Fish & Richardson P.C.
- Priority: JP2016-024845 20160212; JP2016-125480 20160624
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L29/786 ; H01L27/12 ; H01L29/04 ; H01L29/24 ; H01L27/06 ; H01L21/8258 ; H01L27/088

Abstract:
A semiconductor device with improved electrical characteristics is provided. A semiconductor device with improved field effect mobility is provided. A semiconductor device in which the field-effect mobility is not lowered even at high temperatures is provided. A semiconductor device which can be formed at low temperatures is provided. A semiconductor device with improved productivity can be provided. In the semiconductor device, there is a range of a gate voltage where the field-effect mobility increases as the temperature increases within a range of the gate voltage from 0 V to 10 V. For example, such a range of a gate voltage exists at temperatures ranging from a room temperature (25° C.) to 120° C. In the semiconductor device, the off-state current is kept extremely low (lower than or equal to the detection limit of a measurement device) within the above temperature range.
Public/Granted literature
- US20180337289A1 SEMICONDUCTOR DEVICE Public/Granted day:2018-11-22
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