Invention Grant
- Patent Title: Method of forming hole in glass substrate by using pulsed laser, and method of producing glass substrate provided with hole
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Application No.: US15276990Application Date: 2016-09-27
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Publication No.: US10442720B2Publication Date: 2019-10-15
- Inventor: Kohei Horiuchi , Motoshi Ono
- Applicant: AGC Inc.
- Applicant Address: JP Chiyoda-ku
- Assignee: AGC Inc.
- Current Assignee: AGC Inc.
- Current Assignee Address: JP Chiyoda-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2015-196264 20151001
- Main IPC: C03B33/08
- IPC: C03B33/08 ; B23K26/073 ; B23K26/0622 ; B23K26/382 ; B23K26/402 ; B23K103/00

Abstract:
Disclosed is a method of forming a hole in a glass substrate by using a pulsed laser, the method including (1) preparing the glass substrate including a first surface and a second surface that face each other; (2) forming a concave portion on the first surface by irradiating, with a first condition, the pulsed laser onto the first surface of the glass substrate through a lens; and (3) forming the hole by irradiating the pulsed laser onto the concave portion with a second condition such that energy density of the pulsed laser is less than or equal to a processing threshold value of the glass substrate.
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