- 专利标题: Method of forming hole in glass substrate by using pulsed laser, and method of producing glass substrate provided with hole
-
申请号: US15276990申请日: 2016-09-27
-
公开(公告)号: US10442720B2公开(公告)日: 2019-10-15
- 发明人: Kohei Horiuchi , Motoshi Ono
- 申请人: AGC Inc.
- 申请人地址: JP Chiyoda-ku
- 专利权人: AGC Inc.
- 当前专利权人: AGC Inc.
- 当前专利权人地址: JP Chiyoda-ku
- 代理机构: Oblon, McClelland, Maier & Neustadt, L.L.P.
- 优先权: JP2015-196264 20151001
- 主分类号: C03B33/08
- IPC分类号: C03B33/08 ; B23K26/073 ; B23K26/0622 ; B23K26/382 ; B23K26/402 ; B23K103/00
摘要:
Disclosed is a method of forming a hole in a glass substrate by using a pulsed laser, the method including (1) preparing the glass substrate including a first surface and a second surface that face each other; (2) forming a concave portion on the first surface by irradiating, with a first condition, the pulsed laser onto the first surface of the glass substrate through a lens; and (3) forming the hole by irradiating the pulsed laser onto the concave portion with a second condition such that energy density of the pulsed laser is less than or equal to a processing threshold value of the glass substrate.
公开/授权文献
信息查询