- Patent Title: Method of testing an object and apparatus for performing the same
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Application No.: US15938570Application Date: 2018-03-28
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Publication No.: US10444162B2Publication Date: 2019-10-15
- Inventor: Shinji Ueyama , Masato Kajinami , Tatsuya Ishimoto
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si, Gyeonggi-Do
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si, Gyeonggi-Do
- Agency: F. Chau & Associates, LLC
- Priority: JP2017-073703 20170403; KR10-2017-0139624 20171025
- Main IPC: G01N21/88
- IPC: G01N21/88 ; H01L21/67 ; H01L21/66 ; G01B11/30 ; G01N21/94 ; G01N21/95 ; G01B11/06 ; G01B11/25 ; H01L21/687

Abstract:
An apparatus for testing an object includes a moving unit configured to hold and move the object. A transmissive illuminating unit includes a light source generating light and a transmissive mask pattern. The transmissive mask pattern includes a first region configured to convert the light generated from the light source into a slit light, and a second region arranged in a movement direction of the object with respect to the first region to partially transmit the light generated from the light source. The transmissive illuminating unit is configured to project a measuring light, which is provided by transmitting the light generated from the light source through the transmissive mask pattern, to the object. A detecting unit is configured to receive a reflected light of the measuring light from the object and to detect a height and surface state of the object based on the reflected light.
Public/Granted literature
- US20180284032A1 METHOD OF TESTING AN OBJECT AND APPARATUS FOR PERFORMING THE SAME Public/Granted day:2018-10-04
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