Invention Grant
- Patent Title: Integrated circuit chip with molding compound handler substrate and method
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Application No.: US15386097Application Date: 2016-12-21
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Publication No.: US10446442B2Publication Date: 2019-10-15
- Inventor: Shahid A. Butt , Christopher L. Tessler
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Gibb & Riley, LLC
- Agent Michael J. LeStrange, Esq.
- Main IPC: H01L21/683
- IPC: H01L21/683 ; H01L21/768 ; H01L23/48 ; H01L23/66 ; H01L21/84 ; H01L27/12 ; H01L29/78 ; H01L49/02 ; H01L29/40 ; H01L23/367

Abstract:
Disclosed are integrated circuit (IC) chip structures (e.g., radio frequency (RF) IC chip structures) and methods of forming the structures with an electrically insulative molding compound handler substrate. Each structure includes at least: an electrically insulative molding compound handler substrate; an insulator layer on the handler substrate; and one or more semiconductor devices (e.g., RF semiconductor devices) on the insulator layer. Each method includes at least: attaching a temporary carrier above back end of the line (BEOL) metal levels, which are over an interlayer dielectric layer covering one or more semiconductor devices; removing at least a portion of a semiconductor handler substrate, which is below the semiconductor device(s) and separated therefrom by an insulator layer; replacing the semiconductor handler substrate with a replacement handler substrate made of an electrically insulative molding compound; and removing the temporary carrier. The molding compound handler substrate provides backside isolation that prevents unwanted noise coupling.
Public/Granted literature
- US20180174948A1 INTEGRATED CIRCUIT CHIP WITH MOLDING COMPOUND HANDLER SUBSTRATE AND METHOD Public/Granted day:2018-06-21
Information query
IPC分类: