Invention Grant
- Patent Title: High-molecular-weight polysilane and method for producing same
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Application No.: US15326632Application Date: 2015-06-30
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Publication No.: US10450419B2Publication Date: 2019-10-22
- Inventor: Masahisa Endo , Gun Son , Yuichi Goto , Kentaro Nagai
- Applicant: Thin Film Electronics ASA
- Applicant Address: NO Oslo
- Assignee: Thin Film Electronics ASA
- Current Assignee: Thin Film Electronics ASA
- Current Assignee Address: NO Oslo
- Agency: Central California IP Group, P.C.
- Agent Andrew D. Fortney
- Priority: JP2014-145819 20140716
- International Application: PCT/JP2015/068819 WO 20150630
- International Announcement: WO2016/009827 WO 20160121
- Main IPC: C08G77/60
- IPC: C08G77/60 ; C01B33/02 ; C01B33/04 ; C03C17/22 ; B05D3/02 ; C01B33/021 ; C09D5/24 ; C09D183/16 ; H01L21/02

Abstract:
There is provided a highly conductive and good silicon thin film which is obtained by applying a coating-type polysilane composition prepared by use of a polysilane having a large weight average molecular weight to a substrate, followed by baking. A polysilane having a weight average molecular weight of 5,000 to 8,000. The polysilane may be a polymer of cyclopentasilane. A silicon film obtained by applying a polysilane composition in which the polysilane is dissolved in a solvent to a substrate, and baking the substrate at 100° C. to 425° C. The cyclopentasilane may be polymerized in the presence of a palladium catalyst supported on a polymer. The palladium catalyst supported on a polymer may be a catalyst in which palladium as a catalyst component is immobilized on a functional polystyrene. The palladium may be a palladium compound or a palladium complex. The palladium-immobilized catalyst may be formed by microencapsulating a zero-valent palladium complex or a divalent palladium compound with a functional polystyrene. The zero-valent palladium complex may be a tetrakis(triphenylphosphine)palladium (0) complex.
Public/Granted literature
- US20170210857A1 High-Molecular-Weight Polysilane and Method for Producing Same Public/Granted day:2017-07-27
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