Invention Grant
- Patent Title: Junction region between two waveguides and associated method of production
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Application No.: US16374214Application Date: 2019-04-03
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Publication No.: US10451802B2Publication Date: 2019-10-22
- Inventor: Charles Baudot
- Applicant: STMicroelectronics (Crolles 2) SAS
- Applicant Address: FR Crolles
- Assignee: STMicroelectronics (Crolles 2) SAS
- Current Assignee: STMicroelectronics (Crolles 2) SAS
- Current Assignee Address: FR Crolles
- Agency: Crowe & Dunlevy
- Priority: FR1656188 20160630
- Main IPC: G02B6/125
- IPC: G02B6/125 ; G02B6/122 ; G02B6/136 ; G02B6/12

Abstract:
A photonic integrated device includes a first waveguide and a second waveguide. The first and second waveguides are mutually coupled at a junction region which includes a bulge region. The bulge region is defined two successive etching operations using two distinct etch masks, where the first etching operation is a partial etch and the second etching operation is a complete etch.
Public/Granted literature
- US20190235166A1 JUNCTION REGION BETWEEN TWO WAVEGUIDES AND ASSOCIATED METHOD OF PRODUCTION Public/Granted day:2019-08-01
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