Invention Grant
- Patent Title: Method for producing a plurality of semiconductor chips and semiconductor chip
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Application No.: US15552259Application Date: 2016-02-15
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Publication No.: US10453989B2Publication Date: 2019-10-22
- Inventor: Lutz Hoeppel , Alexander F. Pfeuffer , Dominik Scholz , Isabel Otto , Norwin Von Malm , Stefan Illek
- Applicant: OSRAM Opto Semiconductors GmbH
- Applicant Address: DE Regensburg
- Assignee: OSRAM OPTO SEMICONDUCTORS GMBH
- Current Assignee: OSRAM OPTO SEMICONDUCTORS GMBH
- Current Assignee Address: DE Regensburg
- Agency: McDermott Will & Emery LLP
- Priority: DE102015102458 20150220
- International Application: PCT/EP2016/053148 WO 20160215
- International Announcement: WO2016/131761 WO 20160825
- Main IPC: H01L21/76
- IPC: H01L21/76 ; H01L33/00 ; H01L33/48 ; H01L21/02

Abstract:
Disclosed is a method for producing a plurality of semiconductor chips (10). A composite (1), which comprises a carrier (4) and a semiconductor layer sequence (2, 3), is provided. Separating trenches (17) are formed in the semiconductor layer sequence (2, 3) along an isolation pattern (16). A filling layer (11) limiting the semiconductor layer sequence (2, 3) toward the separating trenches (17) is applied to a side of the semiconductor layer sequence (2, 3) facing away from the carrier (4). Furthermore, a metal layer (10) adjacent to the filling layer (11) is applied in the separating trenches (17). The semiconductor chips (20) are isolated by removing the metal layer (10) adjacent to the filling layer (11) in the separating trenches (17). Each isolated semiconductor chip (20) has one part of the semiconductor layer sequence (2, 3), and of the filling layer (11). Also disclosed is a semiconductor chip (10).
Public/Granted literature
- US20180069147A1 METHOD FOR PRODUCING A PLURALITY OF SEMICONDUCTOR CHIPS AND SEMICONDUCTOR CHIP Public/Granted day:2018-03-08
Information query
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