Invention Grant
- Patent Title: MEMS transducer package
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Application No.: US15538567Application Date: 2015-12-04
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Publication No.: US10455309B2Publication Date: 2019-10-22
- Inventor: Tsjerk Hoekstra , David Talmage Patten
- Applicant: Cirrus Logic International Semiconductor Ltd.
- Applicant Address: US TX Austin
- Assignee: Cirrus Logic, Inc.
- Current Assignee: Cirrus Logic, Inc.
- Current Assignee Address: US TX Austin
- Agency: Jackson Walker L.L.P.
- International Application: PCT/GB2015/053727 WO 20151204
- International Announcement: WO2016/102923 WO 20160630
- Main IPC: H04R1/00
- IPC: H04R1/00 ; H04R1/04 ; H04R1/28 ; H04R19/00 ; H04R19/04 ; H04R31/00 ; B81B7/00 ; B81C1/00 ; H04R1/34

Abstract:
A MEMS transducer package (1) comprises a semiconductor die element (3) and a cap element (23). The semiconductor die element (3) and cap element (23) have mating surfaces (9, 21). The semiconductor die element (3) and cap element (23) are configured such that when the semiconductor die element (3) and cap element (4) are conjoined, a first volume (7, 27) is formed through the semiconductor die element (3) and into the semiconductor cap element (23), and an acoustic channel is formed to provide an opening between a non-mating surface (11) of the semiconductor die element (3) and either a side surface (10, 12) of the transducer package or a non-mating surface (29) of the cap element (23).
Public/Granted literature
- US20170374441A1 MEMS TRANSDUCER PACKAGE Public/Granted day:2017-12-28
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