- 专利标题： Structures including metal carbide material, devices including the structures, and methods of forming same
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申请号： US14752712申请日： 2015-06-26
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公开(公告)号： US10458018B2公开(公告)日： 2019-10-29
- 发明人: Petri Raisanen , Michael Givens , Eric James Shero
- 申请人： ASM IP Holding B.V.
- 申请人地址： NL Almere
- 专利权人： ASM IP Holding B.V.
- 当前专利权人： ASM IP Holding B.V.
- 当前专利权人地址： NL Almere
- 代理机构： Snell & Wilmer, L.L.P.
- 主分类号： C23C16/455
- IPC分类号： C23C16/455 ; H01L29/49 ; C23C16/32
摘要：
Methods of forming thin-film structures including metal carbide material, and structures and devices including the metal carbide material are disclosed. Exemplary structures include metal carbide material formed using two or more different processes (e.g., two or more different precursors), which enables tuning of various metal carbide material properties, including resistivity, current leakage, and work function.
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