Invention Grant
- Patent Title: Micromechanical detection structure for a MEMS sensor device, in particular a MEMS gyroscope, with improved driving features
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Application No.: US15454907Application Date: 2017-03-09
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Publication No.: US10458794B2Publication Date: 2019-10-29
- Inventor: Gabriele Gattere , Luca Giuseppe Falorni , Carlo Valzasina
- Applicant: STMICROELECTRONICS S.R.L.
- Applicant Address: IT Agrate Brianza
- Assignee: STMicroelectronics S.r.l.
- Current Assignee: STMicroelectronics S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed Intellectual Property Law Group LLP
- Priority: IT102016000024696 20160309
- Main IPC: G01C19/5712
- IPC: G01C19/5712

Abstract:
A micromechanical detection structure includes a substrate of semiconductor material and a driving-mass arrangement is coupled to a set of driving electrodes and driven in a driving movement following upon biasing of the set of driving electrodes. A first anchorage unit is coupled to the driving-mass arrangement for elastically coupling the driving-mass arrangement to the substrate at first anchorages. A driven-mass arrangement is elastically coupled to the driving-mass arrangement by a coupling unit and designed to be driven by the driving movement. A second anchorage unit is coupled to the driven-mass arrangement for elastically coupling the driven-mass arrangement to the substrate at second anchorages. Following upon the driving movement, the resultant of the forces and of the torques exerted on the substrate at the first and second anchorages is substantially zero.
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