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    Frequency modulation MEMS triaxial gyroscope
    1.
    发明授权
    Frequency modulation MEMS triaxial gyroscope 有权

    公开(公告)号：US12038283B2

    公开(公告)日：2024-07-16

    申请号：US17821724

    申请日：2022-08-23

    Applicant: STMICROELECTRONICS S.R.L.

    Inventor： Alessandro Tocchio ,  Luca Giuseppe Falorni ,  Claudia Comi ,  Valentina Zega

    IPC: G01C19/574 ,  G01C19/5747 ,  G01C19/5769

    CPC classification number: G01C19/5747 ,  G01C19/574 ,  G01C19/5769

    Abstract: A frequency modulation MEMS triaxial gyroscope, having two mobile masses; a first and a second driving body coupled to the mobile masses through elastic elements rigid in a first direction and compliant in a second direction transverse to the first direction; and a third and a fourth driving body coupled to the mobile masses through elastic elements rigid in the second direction and compliant in the first direction. A first and a second driving element are coupled to the first and second driving bodies for causing the mobile masses to translate in the first direction in phase opposition. A third and a fourth driving element are coupled to the third and fourth driving bodies for causing the mobile masses to translate in the second direction and in phase opposition. An out-of-plane driving element is coupled to the first and second mobile masses for causing a translation in a third direction, in phase opposition. Movement-sensing electrodes generate frequency signals as a function of external angular velocities.

    Frequency modulation MEMS triaxial gyroscope
    2.
    发明授权
    Frequency modulation MEMS triaxial gyroscope 有权

    公开(公告)号：US11448507B2

    公开(公告)日：2022-09-20

    申请号：US16697092

    申请日：2019-11-26

    Applicant: STMICROELECTRONICS S.R.L.

    Inventor： Alessandro Tocchio ,  Luca Giuseppe Falorni ,  Claudia Comi ,  Valentina Zega

    IPC: G01C19/574 ,  G01C19/5747 ,  G01C19/5769

    Abstract: A frequency modulation MEMS triaxial gyroscope, having two mobile masses; a first and a second driving body coupled to the mobile masses through elastic elements rigid in a first direction and compliant in a second direction transverse to the first direction; and a third and a fourth driving body coupled to the mobile masses through elastic elements rigid in the second direction and compliant in the first direction. A first and a second driving element are coupled to the first and second driving bodies for causing the mobile masses to translate in the first direction in phase opposition. A third and a fourth driving element are coupled to the third and fourth driving bodies for causing the mobile masses to translate in the second direction and in phase opposition. An out-of-plane driving element is coupled to the first and second mobile masses for causing a translation in a third direction, in phase opposition. Movement-sensing electrodes generate frequency signals as a function of external angular velocities.

    MEMS gyroscope having an improved rejection of the quadrature error
    5.
    发明授权
    MEMS gyroscope having an improved rejection of the quadrature error 有权

    公开(公告)号：US11965739B2

    公开(公告)日：2024-04-23

    申请号：US17868479

    申请日：2022-07-19

    Applicant: STMICROELECTRONICS S.r.l.

    Inventor： Daniele Prati ,  Luca Giuseppe Falorni ,  Luca Guerinoni

    IPC: G01C19/5712

    CPC classification number: G01C19/5712

    Abstract: The MEMS gyroscope is formed by a substrate, a first mass and a second mass, wherein the first and the second masses are suspended over the substrate and extend, at rest, in a plane of extension defining a first direction and a second direction transverse to the first direction. The MEMS gyroscope further has a drive structure coupled to the first mass and configured, in use, to cause a movement of the first mass in the first direction, and an elastic coupling structure, which extends between the first mass and the second mass and is configured to couple the movement of the first mass in the first direction with a movement of the second mass in the second direction. The elastic coupling structure has a first portion having a first stiffness and a second portion having a second stiffness greater than the first stiffness.

    MEMS gyroscope with improved rejection of a quadrature error
    6.
    发明授权
    MEMS gyroscope with improved rejection of a quadrature error 有权

    公开(公告)号：US10775171B2

    公开(公告)日：2020-09-15

    申请号：US15956446

    申请日：2018-04-18

    Applicant: STMicroelectronics S.r.l.

    Inventor： Gabriele Gattere ,  Luca Guerinoni ,  Luca Giuseppe Falorni ,  Damiano Milani ,  Francesco Braghin ,  Ferruccio Resta ,  Mohammad Izadi

    IPC: G01C19/5712 ,  G01C19/574 ,  G01C19/5755

    Abstract: A MEMS gyroscope is equipped with: at least a first mobile mass suspended from the top of a substrate by means of elastic suspension elements coupled to anchor points rigidly fixed to the substrate, in such a manner as to be actuated in an actuating movement along a first axis of a horizontal plane and to carry out a measurement movement along a vertical axis, transverse to the horizontal plane, in response to a first angular velocity acting about a second axis of the horizontal plane, transverse to the first axis. The elastic suspension elements are configured in such a manner as to internally compensate unwanted displacements out of the horizontal plane along the vertical axis originating from the actuating movement, such that the mobile mass remains in the horizontal plane during the actuating movement.

    MICROMECHANICAL DETECTION STRUCTURE OF A MEMS MULTI-AXIS GYROSCOPE, WITH REDUCED DRIFTS OF CORRESPONDING ELECTRICAL PARAMETERS
    8.
    发明申请
    MICROMECHANICAL DETECTION STRUCTURE OF A MEMS MULTI-AXIS GYROSCOPE, WITH REDUCED DRIFTS OF CORRESPONDING ELECTRICAL PARAMETERS 审中-公开

    公开(公告)号：US20170284804A1

    公开(公告)日：2017-10-05

    申请号：US15273312

    申请日：2016-09-22

    Applicant: STMICROELECTRONICS S.R.L.

    Inventor： Gabriele Gattere ,  Carlo Valzasina ,  Luca Giuseppe Falorni

    IPC: G01C19/5747

    CPC classification number: G01C19/5747 ,  G01C19/5712

    Abstract: A multi-axis MEMS gyroscope includes a micromechanical detection structure having a substrate, a driving-mass arrangement, a driven-mass arrangement with a central window, and a sensing-mass arrangement which undergoes sensing movements in the presence of angular velocities about a first horizontal axis and a second horizontal axis. A sensing-electrode arrangement is fixed with respect to the substrate and is set underneath the sensing-mass arrangement. An anchorage assembly is set within the central window for constraining the driven-mass arrangement to the substrate at anchorage elements. The anchorage assembly includes a rigid structure suspended above the substrate that is elastically coupled to the driven mass by elastic connection elements at a central portion, and is coupled to the anchorage elements by elastic decoupling elements at end portions thereof.

    MICROMECHANICAL DETECTION STRUCTURE FOR A MEMS SENSOR DEVICE, IN PARTICULAR A MEMS GYROSCOPE, WITH IMPROVED DRIVING FEATURES
    9.
    发明申请
    MICROMECHANICAL DETECTION STRUCTURE FOR A MEMS SENSOR DEVICE, IN PARTICULAR A MEMS GYROSCOPE, WITH IMPROVED DRIVING FEATURES 审中-公开

    公开(公告)号：US20170261322A1

    公开(公告)日：2017-09-14

    申请号：US15454907

    申请日：2017-03-09

    Applicant: STMICROELECTRONICS S.R.L.

    Inventor： Gabriele Gattere ,  Luca Giuseppe Falorni ,  Carlo Valzasina

    IPC: G01C19/5712

    CPC classification number: G01C19/5712

    Abstract: A micromechanical detection structure includes a substrate of semiconductor material and a driving-mass arrangement is coupled to a set of driving electrodes and driven in a driving movement following upon biasing of the set of driving electrodes. A first anchorage unit is coupled to the driving-mass arrangement for elastically coupling the driving-mass arrangement to the substrate at first anchorages. A driven-mass arrangement is elastically coupled to the driving-mass arrangement by a coupling unit and designed to be driven by the driving movement. A second anchorage unit is coupled to the driven-mass arrangement for elastically coupling the driven-mass arrangement to the substrate at second anchorages. Following upon the driving movement, the resultant of the forces and of the torques exerted on the substrate at the first and second anchorages is substantially zero.

    MICROELECTROMECHANICAL GYROSCOPE WITH COMPENSATION OF QUADRATURE ERROR DRIFT
    10.
    发明申请
    MICROELECTROMECHANICAL GYROSCOPE WITH COMPENSATION OF QUADRATURE ERROR DRIFT 有权
    具有补偿误差的微电子陀螺仪

    公开(公告)号：US20150114112A1

    公开(公告)日：2015-04-30

    申请号：US14067051

    申请日：2013-10-30

    Applicant: STMicroelectronics S.r.l

    Inventor： Carlo Valzasina ,  Luca Giuseppe Falorni

    IPC: G01C19/5712

    CPC classification number: G01C19/5712 ,  G01C19/56 ,  G01C19/5719 ,  G01C19/574 ,  G01C19/5747

    Abstract: A microelectromechanical gyroscope, includes: a supporting body; a first movable mass and a second movable mass, which are oscillatable according to a first driving axis and tiltable about respective a first and second sensing axes and are symmetrically arranged with respect to a center of symmetry; first sensing electrodes and a second sensing electrodes associated with the first and second movable masses and arranged on the supporting body symmetrically with respect to the first and second sensing axis, the first and second movable masses being capacitively coupled to the respective first sensing electrode and to the respective second sensing electrode, a bridge element elastically coupled to respective inner ends of the first movable mass and of the second movable mass and coupled to the supporting body so as to be tiltable about an axis transverse to the first driving axis.

    Abstract translation: 一种微机电陀螺仪，包括：支撑体; 第一可移动质量块和第二可移动质量块，它们可根据第一驱动轴线振荡并围绕相应的第一和第二感测轴线可倾斜，并且相对于对称中心对称布置; 第一感测电极和与第一和第二可移动质量相关联并且相对于第一和第二感测轴对称地布置在支撑体上的第二感测电极，第一和第二可移动质量体电容耦合到相应的第一感测电极，并且 相应的第二感测电极，桥接元件，其弹性地联接到第一可移动质量块的相应内端和第二可移动质量块，并且联接到支撑体，以便能够围绕横向于第一驱动轴线的轴线倾斜。

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