Invention Grant
- Patent Title: Linear motor, stage apparatus, and exposure apparatus
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Application No.: US15788745Application Date: 2017-10-19
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Publication No.: US10459350B2Publication Date: 2019-10-29
- Inventor: Shigeru Morimoto , Tadahiro Kominami
- Applicant: NIKON CORPORATION
- Applicant Address: JP Tokyo
- Assignee: Nikon Corporation
- Current Assignee: Nikon Corporation
- Current Assignee Address: JP Tokyo
- Agency: Shapiro, Gabor and Rosenberger, PLLC
- Priority: JP2004-289924 20041001
- Main IPC: G03B27/58
- IPC: G03B27/58 ; G03F7/20 ; H02K41/03 ; H02K9/19 ; H02K9/22 ; H02K3/47 ; H02K16/00

Abstract:
A linear motor with high heat recovery efficiency that inhibits the rise in surface temperature is offered. The linear motor is disposed in a surrounding member (142) and facing a flow passage (142a) of a liquid for regulating temperature, and is provided with a coil unit (141) having at least a part thereof in contact with the liquid. The coil unit (141) is provided with a coil body (144), a mold layer (143) that covers the coil body and holds it in specific form, and a liquid protection layer (150) that covers the mold layer (143) and has liquid protection properties.
Public/Granted literature
- US20180046092A1 LINEAR MOTOR, STAGE APPARATUS, AND EXPOSURE APPARATUS Public/Granted day:2018-02-15
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