- 专利标题: Linear motor, stage apparatus, and exposure apparatus
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申请号: US15788745申请日: 2017-10-19
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公开(公告)号: US10459350B2公开(公告)日: 2019-10-29
- 发明人: Shigeru Morimoto , Tadahiro Kominami
- 申请人: NIKON CORPORATION
- 申请人地址: JP Tokyo
- 专利权人: Nikon Corporation
- 当前专利权人: Nikon Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Shapiro, Gabor and Rosenberger, PLLC
- 优先权: JP2004-289924 20041001
- 主分类号: G03B27/58
- IPC分类号: G03B27/58 ; G03F7/20 ; H02K41/03 ; H02K9/19 ; H02K9/22 ; H02K3/47 ; H02K16/00
摘要:
A linear motor with high heat recovery efficiency that inhibits the rise in surface temperature is offered. The linear motor is disposed in a surrounding member (142) and facing a flow passage (142a) of a liquid for regulating temperature, and is provided with a coil unit (141) having at least a part thereof in contact with the liquid. The coil unit (141) is provided with a coil body (144), a mold layer (143) that covers the coil body and holds it in specific form, and a liquid protection layer (150) that covers the mold layer (143) and has liquid protection properties.
公开/授权文献
- US20180046092A1 LINEAR MOTOR, STAGE APPARATUS, AND EXPOSURE APPARATUS 公开/授权日:2018-02-15
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