Methods of forming a hybrid electrically programmable fuse (e-fuse) structure and the hybrid e-fuse structure are disclosed. In various embodiments, the e-fuse structure includes: a substrate; an insulator layer over the substrate; a pair of contact regions overlying the insulator layer; and a silicide channel overlying the insulator layer and connecting the pair of contact regions, the silicide channel having a first portion including silicide silicon and a second portion coupled with the first portion and on a common level with the first portion, the second portion including silicide silicon germanium (SiGe) or silicide silicon phosphorous (SiP).