- Patent Title: Semiconductor memory device and method of manufacturing the same
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Application No.: US15890707Application Date: 2018-02-07
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Publication No.: US10461153B2Publication Date: 2019-10-29
- Inventor: Kiseok Lee , Myeong-Dong Lee , Hui-Jung Kim , Dongoh Kim , Bong-Soo Kim , Seokhan Park , Woosong Ahn , Sunghee Han , Yoosang Hwang
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2017-0120601 20170919
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L27/108 ; H01L23/535 ; H01L23/528

Abstract:
A semiconductor memory device includes a substrate including active regions, word lines in the substrate and each extending in a first direction parallel to an upper surface of the substrate, bit line structures connected to the active regions, respectively, and each extending in a second direction crossing the first direction, and spacer structures on sidewalls of respective ones of the bit line structures. Each of the spacer structures includes a first spacer, a second spacer, and a third spacer. The second spacer is disposed between the first spacer and the third spacer and includes a void defined by an inner surface of the second spacer. A height of the second spacer is greater than a height of the void.
Public/Granted literature
- US20190088739A1 SEMICONDUCTOR MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2019-03-21
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