A relaxation oscillator can provide a smaller and cheaper alternative to a crystal oscillator circuit in a wide variety of applications. A sawtooth relaxation oscillator can include overshoot error integration. Separate and distinct oscillator capacitor charging, overshoot error integration, and reset phases can be provided using separate comparators for first and second oscillation capacitors. Potential advantages can include high accuracy high-frequency clock, convenient trimming during initial calibration, clock frequency stability over temperature and time, fast startup with low overshoot, high power supply rejection, low power, or low noise/jitter. The oscillator can charge an oscillation capacitor up to a target voltage, then interrupt charging before beginning an error integration phase that adjusts the target voltage by integrating an overshoot error of a voltage on the oscillation capacitor. After completing the overshoot error integration, the voltage on the oscillation capacitor can be reset. The techniques described are believed to be capable of improving clock frequency accuracy and other characteristics.