Invention Grant
- Patent Title: Microelectromechanical gyroscope with compensation of quadrature error drift
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Application No.: US15201133Application Date: 2016-07-01
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Publication No.: US10466052B2Publication Date: 2019-11-05
- Inventor: Carlo Valzasina , Luca Giuseppe Falorni
- Applicant: STMICROELECTRONICS S.R.L.
- Applicant Address: IT Agrate Brianza
- Assignee: STMicroelectronics S.R.L.
- Current Assignee: STMicroelectronics S.R.L.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed IP Law Group LLP
- Main IPC: G01C19/5712
- IPC: G01C19/5712 ; G01C19/56 ; G01C19/5719 ; G01C19/574 ; G01C19/5747

Abstract:
A microelectromechanical gyroscope, includes: a supporting body; a first movable mass and a second movable mass, which are oscillatable according to a first driving axis and tiltable about respective a first and second sensing axes and are symmetrically arranged with respect to a center of symmetry; first sensing electrodes and a second sensing electrodes associated with the first and second movable masses and arranged on the supporting body symmetrically with respect to the first and second sensing axis, the first and second movable masses being capacitively coupled to the respective first sensing electrode and to the respective second sensing electrode, a bridge element elastically coupled to respective inner ends of the first movable mass and of the second movable mass and coupled to the supporting body so as to be tiltable about an axis transverse to the first driving axis.
Public/Granted literature
- US20160313123A1 MICROELECTROMECHANICAL GYROSCOPE WITH COMPENSATION OF QUADRATURE ERROR DRIFT Public/Granted day:2016-10-27
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