Invention Grant
- Patent Title: Inspection unit, inspection method, and substrate treating apparatus including the same
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Application No.: US15010242Application Date: 2016-01-29
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Publication No.: US10471457B2Publication Date: 2019-11-12
- Inventor: Keunhwa Yang , Yoon Jong Ju , Kihoon Choi , Kwangsup Kim
- Applicant: Semes Co., Ltd
- Applicant Address: KR Chungcheongnam-do
- Assignee: Semes Co., Ltd.
- Current Assignee: Semes Co., Ltd.
- Current Assignee Address: KR Chungcheongnam-do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2015-0014984 20150130
- Main IPC: H01L21/66
- IPC: H01L21/66 ; B05C11/00 ; B05B17/06 ; B05B1/14 ; B05B13/02 ; B05B14/44

Abstract:
A substrate treating apparatus includes a treatment unit including a container, and a support member in the interior of the container to support a substrate, the treatment unit being configured to treat the substrate a nozzle unit having a treatment liquid nozzle for supplying a treatment liquid to the substrate provided in the treatment unit and an inspection unit that inspects whether the treatment liquid is normally discharged from the treatment liquid nozzle. The nozzle further includes a nozzle driver that moves the treatment liquid nozzle from a process position at which the substrate is treated by the treatment unit and an inspection position at which the treatment liquid nozzle is inspected by the inspection unit.
Public/Granted literature
- US20160221021A1 INSPECTION UNIT, INSPECTION METHOD, AND SUBSTRATE TREATING APPARATUS INCLUDING THE SAME Public/Granted day:2016-08-04
Information query
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