Invention Grant
- Patent Title: Durable miniature gas composition detector having fast response time
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Application No.: US15783293Application Date: 2017-10-13
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Publication No.: US10475992B2Publication Date: 2019-11-12
- Inventor: Olivier Le Neel , Ravi Shankar
- Applicant: STMicroelectronics Pte Ltd
- Applicant Address: SG Singapore
- Assignee: STMicroelectronics Pte Ltd
- Current Assignee: STMicroelectronics Pte Ltd
- Current Assignee Address: SG Singapore
- Agency: Seed IP Law Group LLP
- Main IPC: H01L43/14
- IPC: H01L43/14 ; G01N27/74 ; H01L21/8234 ; H01L43/04 ; H01L43/06 ; H01L43/10

Abstract:
A miniature oxygen sensor makes use of paramagnetic properties of oxygen gas to provide a fast response time, low power consumption, improved accuracy and sensitivity, and superior durability. The miniature oxygen sensor disclosed maintains a sample of ambient air within a micro-channel formed in a semiconductor substrate. O2 molecules segregate in response to an applied magnetic field, thereby establishing a measureable Hall voltage. Oxygen present in the sample of ambient air can be deduced from a change in Hall voltage with variation in the applied magnetic field. The magnetic field can be applied either by an external magnet or by a thin film magnet integrated into a gas sensing cavity within the micro-channel. A differential sensor further includes a reference element containing an unmagnetized control sample. The miniature oxygen sensor is suitable for use as a real-time air quality monitor in consumer products such as smart phones.
Public/Granted literature
- US20180090678A1 DURABLE MINIATURE GAS COMPOSITION DETECTOR HAVING FAST RESPONSE TIME Public/Granted day:2018-03-29
Information query
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