Invention Grant
- Patent Title: Method for fabricating division mask
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Application No.: US15701856Application Date: 2017-09-12
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Publication No.: US10476003B2Publication Date: 2019-11-12
- Inventor: Jongbum Kim , Sangmin Yi , Daewon Baek , Minchul Song , Sangshin Lee , Seungjin Lee , Jiyun Chun
- Applicant: SAMSUNG DISPLAY CO., LTD.
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-si
- Agency: Lewis Roca Rothgerber Christie LLP
- Priority: KR10-2016-0121527 20160922
- Main IPC: B05C11/11
- IPC: B05C11/11 ; H01L51/00 ; H01L21/00 ; H01L21/67 ; C23C14/04 ; C23C14/12 ; H01L51/56

Abstract:
A method of manufacturing a division mask includes pulling opposite end portions of a mask member in a first direction to fasten the mask member to a fastening portion, forming a first pattern portion having a plurality of first openings on the fastened mask member, such that the first pattern portion has a longer length in the first direction toward a central portion of the first pattern portion, and cutting the opposite end portions of the mask member to detach the mask member from the fastening portion.
Public/Granted literature
- US20180083193A1 METHOD FOR FABRICATING DIVISION MASK Public/Granted day:2018-03-22
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