Density sensor and density sensor manufacturing method
摘要:
A density sensor to measure the density of a gas having a density ranging from 30 gram per cubic meter to 150 kilogram per cubic meter and a working pressure ranging from 0 to 100 bar. The density sensor includes a resonator housing, a membrane, an actuating/detecting module mechanically coupled to the membrane, and a resonating element arranged to be immersed in the gas, the resonating element being mechanically coupled to the membrane by a pedestal. The resonating element is a resonating disk having a thickness ranging from 25 μm to 200 μm and a diameter ranging from 4 mm to 12 mm. The resonating disk extends parallelly to the membrane or being angled relatively to the membrane and is coupled by its center to the pedestal. The resonating disk is made of a metal chosen among the group comprising stainless steel, nickel-iron alloy and Molybdenum.
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