公开(公告)号：US10481060B2

公开(公告)日：2019-11-19

申请号：US15273014

申请日：2016-09-22

申请人： AVENISENSE

发明人： Francois Chaudoreille ,  Guillaume Granier ,  Lucia Jimenez

IPC分类号： G01N9/00 ,  G01N9/10 ,  G01N11/16 ,  G01D11/30

摘要： A density sensor to measure the density of a gas having a density ranging from 30 gram per cubic meter to 150 kilogram per cubic meter and a working pressure ranging from 0 to 100 bar. The density sensor includes a resonator housing, a membrane, an actuating/detecting module mechanically coupled to the membrane, and a resonating element arranged to be immersed in the gas, the resonating element being mechanically coupled to the membrane by a pedestal. The resonating element is a resonating disk having a thickness ranging from 25 μm to 200 μm and a diameter ranging from 4 mm to 12 mm. The resonating disk extends parallelly to the membrane or being angled relatively to the membrane and is coupled by its center to the pedestal. The resonating disk is made of a metal chosen among the group comprising stainless steel, nickel-iron alloy and Molybdenum.