Invention Grant
- Patent Title: Method for making a well disposed over a sensor
-
Application No.: US15945707Application Date: 2018-04-04
-
Publication No.: US10483123B2Publication Date: 2019-11-19
- Inventor: Phil Waggoner , Jordan Owens
- Applicant: Life Technologies Corporation
- Applicant Address: US CA Carlsbad
- Assignee: LIFE TECHNOLOGIES CORPORATION
- Current Assignee: LIFE TECHNOLOGIES CORPORATION
- Current Assignee Address: US CA Carlsbad
- Main IPC: H01L21/311
- IPC: H01L21/311 ; G01N27/414 ; H01L21/02 ; H01L21/027 ; H01L21/285 ; H01L21/3213

Abstract:
A method for forming a well providing access to a sensor pad includes patterning a first photoresist layer over a dielectric structure disposed over the sensor pad; etching a first access into the dielectric structure and over the sensor pad, the first access having a first characteristic diameter; patterning a second photoresist layer over the dielectric structure; and etching a second access over the dielectric structure and over the sensor pad. The second access has a second characteristic diameter. The first and second accesses overlapping. A diameter ratio of the first characteristic diameter to the second characteristic diameter is not greater than 0.7. The first access exposes the sensor pad. The second access has a bottom depth less than a bottom depth of the first access.
Public/Granted literature
- US20180366340A1 METHOD FOR MAKING A WELL DISPOSED OVER A SENSOR Public/Granted day:2018-12-20
Information query
IPC分类: