Invention Grant
- Patent Title: Bottom package exposed die MEMS pressure sensor integrated circuit package design
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Application No.: US15212107Application Date: 2016-07-15
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Publication No.: US10483191B2Publication Date: 2019-11-19
- Inventor: Aaron Cadag , Frederick Arellano , Ernesto Antilano, Jr.
- Applicant: STMicroelectronics, Inc.
- Applicant Address: PH Calamba
- Assignee: STMICROELECTRONICS, INC.
- Current Assignee: STMICROELECTRONICS, INC.
- Current Assignee Address: PH Calamba
- Agency: Seed IP Law Group LLP
- Main IPC: B81B7/00
- IPC: B81B7/00 ; H01L23/495 ; H01L23/00 ; H01L21/56 ; H01L23/31 ; B81C1/00

Abstract:
A MEMS pressure sensor packaged with a molding compound. The MEMS pressure sensor features a lead frame, a MEMS semiconductor die, a second semiconductor die, multiple pluralities of bonding wires, and a molding compound. The MEMS semiconductor die has an internal chamber, a sensing component, and apertures. The MEMS semiconductor die and the apertures are exposed to an ambient atmosphere. A method is desired to form a MEMS pressure sensor package that reduces defects caused by mold flashing and die cracking. Fabrication of the MEMS pressure sensor package comprises placing a lead frame on a lead frame tape; placing a MEMS semiconductor die adjacent to the lead frame and on the lead frame tape with the apertures facing the tape and being sealed thereby; attaching a second semiconductor die to the MEMS semiconductor die; attaching pluralities of bonding wires to form electrical connections between the MEMS semiconductor die, the second semiconductor die, and the lead frame; and forming a molding compound.
Public/Granted literature
- US20180016133A1 BOTTOM PACKAGE EXPOSED DIE MEMS PRESSURE SENSOR INTEGRATED CIRCUIT PACKAGE DESIGN Public/Granted day:2018-01-18
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