Invention Grant
- Patent Title: Integrated circuit device
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Application No.: US16150795Application Date: 2018-10-03
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Publication No.: US10483399B2Publication Date: 2019-11-19
- Inventor: Jae-yup Chung , Myung-yoon Um , Dong-ho Cha , Jung-gun You , Gi-gwan Park
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si, Gyeonggi-do
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si, Gyeonggi-do
- Agency: Lee & Horse, P.C.
- Priority: KR10-2016-0027138 20160307
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L27/12 ; H01L29/66 ; H01L21/84 ; H01L21/8234 ; H01L27/088 ; H01L21/8238 ; H01L29/08 ; H01L27/092 ; H01L29/06 ; H01L29/16 ; H01L29/161

Abstract:
An integrated circuit (IC) device includes a pair of fin-shaped active areas that are adjacent to each other with a fin separation area therebetween, the pair of fin-shaped active areas extend in a line, and a fin separation insulating structure in the fin separation area, wherein the pair of fin-shaped active areas includes a first fin-shaped active area having a first corner defining part of the fin separation area, and wherein the fin separation insulating structure includes a lower insulating pattern that covers sidewalls of the pair of fin-shaped active areas, and an upper insulating pattern on the lower insulating pattern to cover at least part of the first corner, the upper insulating pattern having a top surface at a level higher than a top surface of each of the pair of fin-shaped active areas.
Public/Granted literature
- US20190035934A1 INTEGRATED CIRCUIT DEVICE Public/Granted day:2019-01-31
Information query
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