Invention Grant
- Patent Title: MEMS switch and electronic device
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Application No.: US15255757Application Date: 2016-09-02
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Publication No.: US10508025B2Publication Date: 2019-12-17
- Inventor: Jotaro Akiyama , Kenji Endou , Takashi Aoyagi , Katsunori Osanai , Tohru Inoue
- Applicant: TDK CORPORATION
- Applicant Address: JP Tokyo
- Assignee: TDK CORPORATION
- Current Assignee: TDK CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JP2015-173149 20150902; JP2015-173151 20150902
- Main IPC: H01L41/00
- IPC: H01L41/00 ; B81B7/00 ; B81B3/00 ; B81B7/02

Abstract:
A MEMS switch includes a first signal line provided in a first beam, a first GND adjacent to the first signal line, a second signal line provided in a second beam, and a second GND adjacent to the second signal line. A contact terminal is fixed to any one of the first signal line and the second signal line and performs connection between the first signal line and the second signal line according to deformation of the first beam.
Public/Granted literature
- US20190077655A1 MEMS SWITCH AND ELECTRONIC DEVICE Public/Granted day:2019-03-14
Information query
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