公开(公告)号：US10917728B2

公开(公告)日：2021-02-09

申请号：US16509761

申请日：2019-07-12

Applicant: TDK CORPORATION

Inventor： Akifumi Kamijima ,  Tohru Inoue

IPC: H04R19/04

Abstract: A MEMS microphone includes a substrate, and a first conversion portion and a second conversion portion provided on the substrate, the first conversion portion and the second conversion portion convert sound into an electrical signal, the first conversion portion includes a first through hole, a first membrane covering the first through hole, and a first back plate facing the first membrane via a first air gap, the second conversion portion includes a second through hole, a second membrane covering the second through hole, and a second back plate facing the second membrane via a second air gap, and a dimension of the second air gap is greater than a dimension of the first air gap in a thickness direction of the substrate.

公开(公告)号：US11350221B2

公开(公告)日：2022-05-31

申请号：US17143401

申请日：2021-01-07

Applicant: TDK CORPORATION

Inventor： Akifumi Kamijima ,  Tohru Inoue

IPC: H04R19/04

Abstract: A MEMS microphone includes a substrate, and a first conversion portion and a second conversion portion provided on the substrate, the first conversion portion and the second conversion portion convert sound into an electrical signal, the first conversion portion includes a first through hole, a first membrane covering the first through hole, and a first back plate facing the first membrane via a first air gap, the second conversion portion includes a second through hole, a second membrane covering the second through hole, and a second back plate facing the second membrane via a second air gap, and a dimension of the second air gap is greater than a dimension of the first air gap in a thickness direction of the substrate.

公开(公告)号：US10508025B2

公开(公告)日：2019-12-17

申请号：US15255757

申请日：2016-09-02

Applicant: TDK CORPORATION

Inventor： Jotaro Akiyama ,  Kenji Endou ,  Takashi Aoyagi ,  Katsunori Osanai ,  Tohru Inoue

IPC: H01L41/00 ,  B81B7/00 ,  B81B3/00 ,  B81B7/02

Abstract: A MEMS switch includes a first signal line provided in a first beam, a first GND adjacent to the first signal line, a second signal line provided in a second beam, and a second GND adjacent to the second signal line. A contact terminal is fixed to any one of the first signal line and the second signal line and performs connection between the first signal line and the second signal line according to deformation of the first beam.

公开(公告)号：US10687149B2

公开(公告)日：2020-06-16

申请号：US16509628

申请日：2019-07-12

Applicant: TDK CORPORATION

Inventor： Akifumi Kamijima ,  Tohru Inoue

IPC: H04R19/04 ,  H04R3/04 ,  H04R3/00 ,  H04R25/00 ,  B81B7/00

Abstract: A MEMS microphone includes a substrate, and a first conversion portion and a second conversion portion provided on the substrate, the first conversion portion and the second conversion portion convert sound into an electrical signal, the first conversion portion includes a first through hole, a first membrane covering the first through hole, and a first back plate facing the first membrane via a first air gap, the second conversion portion includes a second through hole, a second membrane covering the second through hole, and a second back plate facing the second membrane via a second air gap, and an area of the second membrane is 1.21 times or more and 2.25 times or less an area of the first membrane when viewed in a thickness direction of the substrate.

公开(公告)号：US09627737B2

公开(公告)日：2017-04-18

申请号：US14750528

申请日：2015-06-25

Applicant: TDK CORPORATION

Inventor： Makoto Yoshida ,  Kenichi Yoshida ,  Tohru Inoue ,  Takaaki Domon ,  Takashi Ota ,  Katsunori Osanai

IPC: H01P3/10 ,  H01P3/12 ,  H01P9/00 ,  B82Y30/00 ,  H01Q1/36 ,  H01Q1/38 ,  H01Q1/40 ,  B82Y99/00

CPC classification number: H01P3/10 ,  B82Y30/00 ,  B82Y99/00 ,  H01P3/122 ,  H01P9/006 ,  H01Q1/368 ,  H01Q1/38 ,  H01Q1/40 ,  Y10S977/742

Abstract: A high-frequency transmission line in which the alternating-current resistance is low is provided. A high-frequency transmission line 2 is a high-frequency transmission line 2 to transmit an alternating-current electric signal, and contains metal and carbon nanotube, and the carbon nanotube is unevenly distributed at a peripheral part 8 of a cross-section that is of the high-frequency transmission line 2 and that is perpendicular to a transmission direction of the alternating-current electric signal.

公开(公告)号：US09620840B2

公开(公告)日：2017-04-11

申请号：US14750662

申请日：2015-06-25

Applicant: TDK CORPORATION

Inventor： Makoto Yoshida ,  Kenichi Yoshida ,  Tohru Inoue ,  Takaaki Domon ,  Takashi Ota ,  Katsunori Osanai

IPC: H01P3/10 ,  H01P3/00 ,  H01P11/00 ,  H01Q1/36 ,  B82Y30/00 ,  H01Q1/38 ,  B82Y99/00

CPC classification number: H01P3/10 ,  B82Y30/00 ,  B82Y99/00 ,  H01P3/00 ,  H01P11/00 ,  H01Q1/368 ,  H01Q1/38 ,  Y10S977/742

Abstract: A high-frequency transmission line in which the alternating-current resistance is low and that is hard to disconnect is provided. A high-frequency transmission line 2 is a high-frequency transmission line 2 to transmit an alternating-current electric signal, and contains metal and carbon nanotube, and the carbon nanotube is unevenly distributed at a central part 6 of a cross-section that is of the high-frequency transmission line 2 and that is perpendicular to a transmission direction of the alternating-current electric signal.