Invention Grant
- Patent Title: Semiconductor devices including Si/Ge active regions with different Ge concentrations
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Application No.: US15944885Application Date: 2018-04-04
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Publication No.: US10522555B2Publication Date: 2019-12-31
- Inventor: Elliot John Smith , Gunter Grasshoff , Carsten Peters
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01L27/11 ; H01L21/311

Abstract:
In semiconductor devices, some active regions may frequently have to be formed on the basis of a silicon/germanium (Si/Ge) mixture in order to appropriately adjust transistor characteristics, for instance, for P-type transistors. To this end, the present disclosure provides manufacturing techniques and respective devices in which at least two different types of active regions, including Si/Ge material, may be provided with a high degree of compatibility with conventional process strategies. Due to the provision of different germanium concentrations, increased flexibility in adjusting characteristics of transistor elements that require Si/Ge material in their active regions may be achieved.
Public/Granted literature
- US20190312041A1 SEMICONDUCTOR DEVICES INCLUDING SI/GE ACTIVE REGIONS WITH DIFFERENT GE CONCENTRATIONS Public/Granted day:2019-10-10
Information query
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