Invention Grant
- Patent Title: Micro-electro-mechanical actuator device of piezoelectric type and apparatus integrating the micro-electro-mechanical actuator device
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Application No.: US16197810Application Date: 2018-11-21
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Publication No.: US10532922B2Publication Date: 2020-01-14
- Inventor: Domenico Giusti , Carlo Luigi Prelini
- Applicant: STMicroelectronics S.r.l.
- Applicant Address: IT Agrate Brianza (MB)
- Assignee: STMicroelectronics S.r.l.
- Current Assignee: STMicroelectronics S.r.l.
- Current Assignee Address: IT Agrate Brianza (MB)
- Agency: Crowe & Dunlevy
- Priority: IT102017000135836 20171127
- Main IPC: H01L29/82
- IPC: H01L29/82 ; B81B3/00 ; H04R17/00

Abstract:
A micro-electro-mechanical actuator device includes a fixed structure and a mobile structure. The mobile structure includes a first deformable band, a second deformable band, and a third deformable band, both of which extend on opposite sides of the first deformable band, each of which carries a piezoelectric actuator. In a working condition, in which the second and third piezoelectrics are biased, the second and third deformable bands are subjected to a negative bending, while the first deformable band is subjected to a positive bending. There are thus generated two translations that add together, causing a displacement of the first deformable band greater than the one that may be obtained by a single membrane of an equal base area.
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