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公开(公告)号：US12225824B2
公开(公告)日：2025-02-11
申请号：US17485719
申请日：2021-09-27
Applicant: STMicroelectronics S.r.l.
Inventor： Domenico Giusti , Irene Martini , Davide Assanelli , Paolo Ferrarini , Carlo Luigi Prelini , Fabio Quaglia
Abstract: A piezoelectric microelectromechanical structure is provided with a piezoelectric stack having a main extension in a horizontal plane and a variable section in a plane transverse to the horizontal plane. The stack is formed by a bottom-electrode region, a piezoelectric material region arranged on the bottom-electrode region, and a top-electrode region arranged on the piezoelectric material region. The piezoelectric material region has, as a result of the variable section, a first thickness along a vertical axis transverse to the horizontal plane at a first area, and a second thickness along the same vertical axis at a second area. The second thickness is smaller than the first thickness. The structure at the first and second areas can form piezoelectric detector and a piezoelectric actuator, respectively.
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公开(公告)号：US12156541B2
公开(公告)日：2024-12-03
申请号：US17118452
申请日：2020-12-10
Applicant: STMicroelectronics S.r.l.
Inventor： Domenico Giusti , Irene Martini
Abstract: A microfluidic dispensing device has a plurality of chambers arranged in sequence, each having an inlet receiving a liquid to be dispensed and a nozzle for emitting a drop of liquid. An actuator in each chamber receives an actuation quantity and causes a drop of liquid to be emitted by the nozzle of the respective chamber. A drop emission detection element in each chamber generates an actuation command upon detecting the emission of a drop of liquid. A sequential activation electric circuit includes a plurality of sequential activation elements, one for each chamber, each coupled to the drop emission detection element of the respective chamber and to an actuator associated with a subsequent chamber in the sequence of chambers. Each sequential activation element receives the actuation command from the drop emission detection element associated with the respective chamber and activates the actuator associated with the subsequent chamber in the sequence of chambers.
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公开(公告)号：US12117605B2
公开(公告)日：2024-10-15
申请号：US17355861
申请日：2021-06-23
Applicant: STMicroelectronics S.r.l.
Inventor： Domenico Giusti , Massimiliano Merli
CPC classification number: G02B26/04 , H10N30/057 , H10N30/2047 , H10N30/506 , H10N30/88
Abstract: A MEMS actuator includes a main body having a central portion, couplable to a substrate, and a peripheral portion suspended over the substrate when the central portion is coupled to the substrate. The peripheral portion has a deformable structure extending around the central portion, and forming successively arranged membranes. The MEMS actuator includes bearing structures and corresponding piezoelectric actuators. The bearing structures are fixed at their top to the deformable structure and laterally delimit corresponding cavities, each having a lateral opening facing the central portion of the main body and closed at the top by a membrane. A fixed part of the membrane is fixed to the underlying bearing structure and a suspended part is laterally offset with respect to the underlying bearing structure. The piezoelectric actuators are controllable to cause deformation of the corresponding membrane and rotation of the bearing structures around the central portion of the main body.
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公开(公告)号：US11600765B2
公开(公告)日：2023-03-07
申请号：US17137220
申请日：2020-12-29
Applicant: STMICROELECTRONICS S.r.l.
Inventor： Domenico Giusti , Carlo Luigi Prelini , Marco Ferrera , Carla Maria Lazzari , Luca Seghizzi , Nicolo′ Boni , Roberto Carminati , Fabio Quaglia
Abstract: The MEMS actuator is formed by a substrate, which surrounds a cavity; by a deformable structure suspended on the cavity; by an actuation structure formed by a first piezoelectric region of a first piezoelectric material, supported by the deformable structure and configured to cause a deformation of the deformable structure; and by a detection structure formed by a second piezoelectric region of a second piezoelectric material, supported by the deformable structure and configured to detect the deformation of the deformable structure.
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5.发明授权公开(公告)号：US11560886B2
公开(公告)日：2023-01-24
申请号：US16847521
申请日：2020-04-13
Applicant: STMICROELECTRONICS S.R.L.
Inventor： Domenico Giusti , Lorenzo Baldo , Enri Duqi
IPC: F04B43/04 , H01L27/20 , H01L41/047 , H01L41/09 , H01L41/31 , F04B43/02 , F04B45/047
Abstract: A micropump device is formed in a monolithic semiconductor body integrating a plurality of actuator elements arranged side-by-side. Each actuator element has a first chamber extending at a distance from a first face of the monolithic body; a membrane arranged between the first face and the first chamber; a piezoelectric element extending on the first face over the membrane; a second chamber, arranged between the first chamber and a second face of the monolithic body; a fluidic inlet path fluidically connecting the second chamber with the outside of the monolithic body; and a fluid outlet opening extending in a transverse direction in the monolithic body from the second face as far as the second chamber, through the first chamber. The monolithic formation of the actuator elements and the possibility of driving the actuator elements at different voltages enable precise adjustment of flows, from very low values to high values.
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Patent Agency Ranking
公开(公告)号：US11084283B2
公开(公告)日：2021-08-10
申请号：US16676070
申请日：2019-11-06
Applicant: STMICROELECTRONICS S.R.L. , STMICROELECTRONICS, INC.
Inventor： Domenico Giusti , Marco Ferrera , Carlo Luigi Prelini , Simon Dodd
Abstract: Ejection device for fluid, comprising a solid body including: first semiconductor body including a chamber for containing the fluid, an ejection nozzle in fluid connection with the chamber, and an actuator operatively connected to the chamber to generate, in use, one or more pressure waves in the fluid such as to cause ejection of the fluid from the ejection nozzle; and a second semiconductor body including a channel for feeding the fluid to the chamber, coupled to the first semiconductor body, in such a way that the channel is in fluid connection with the chamber. The second semiconductor body integrates a damping cavity over which extends a damping membrane, the damping cavity and the damping membrane extending laterally to the channel for feeding the fluid.
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公开(公告)号：US10981778B2
公开(公告)日：2021-04-20
申请号：US16752321
申请日：2020-01-24
Applicant: STMicroelectronics S.R.L.
Inventor： Dario Paci , Domenico Giusti , Irene Martini
Abstract: A MEMS device includes a semiconductor support body having a first cavity, a membrane including a peripheral portion, fixed to the support body, and a suspended portion. A first deformable structure is at a distance from a central part of the suspended portion of the membrane and a second deformable structure is laterally offset relative to the first deformable structure towards the peripheral portion of the membrane. A projecting region is fixed under the membrane. The second deformable structure is deformable so as to translate the central part of the suspended portion of the membrane along a first direction, and the first deformable structure is deformable so as to translate the central part of the suspended portion of the membrane along a second direction.
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公开(公告)号：US10941880B2
公开(公告)日：2021-03-09
申请号：US16295410
申请日：2019-03-07
Applicant: STMicroelectronics S.r.l.
Inventor： Domenico Giusti , Oriana Rita Antonia Di Marco , Igor Varisco
Abstract: A valve module includes a semiconductor body, cavities in the semiconductor body separated from each other by a distance, a cantilever structure suspended over each cavity to enable at least partial closing of the cavity, and a piezoelectric actuator for each cantilever structure. The piezoelectric actuator is configured for use to cause a positive bending of the respective cantilever structure and so modulate a rate of air flow through the valve module.
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公开(公告)号：US10225530B2
公开(公告)日：2019-03-05
申请号：US15805705
申请日：2017-11-07
Applicant: STMicroelectronics S.r.l.
Inventor： Domenico Giusti , Roberto Carminati
Abstract: A MEMS device includes a fixed structure and a mobile structure with a reflecting element coupled to the fixed structure through at least a first deformable structure and a second deformable structure. Each of the first and second deformable structures includes a respective number of main piezoelectric elements, with the main piezoelectric elements of the first and second deformable structures configured to be electrically controlled for causing oscillations of the mobile structure about a first axis and a second axis, respectively. The first deformable structure further includes a respective number of secondary piezoelectric elements configured to be controlled so as to vary a first resonance frequency of the mobile structure about the first axis.
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10.发明申请公开(公告)号：US20180063492A1
公开(公告)日：2018-03-01
申请号：US15805705
申请日：2017-11-07
Applicant: STMicroelectronics S.r.l.
Inventor： Domenico Giusti , Roberto Carminati
CPC classification number: H04N9/3135 , B81B3/0045 , G02B7/1821 , G02B26/0858 , G02B26/101 , G02B26/105 , H04N9/3173
Abstract: A MEMS device includes a fixed structure and a mobile structure with a reflecting element coupled to the fixed structure through at least a first deformable structure and a second deformable structure. Each of the first and second deformable structures includes a respective number of main piezoelectric elements, with the main piezoelectric elements of the first and second deformable structures configured to be electrically controlled for causing oscillations of the mobile structure about a first axis and a second axis, respectively. The first deformable structure further includes a respective number of secondary piezoelectric elements configured to be controlled so as to vary a first resonance frequency of the mobile structure about the first axis.
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