Invention Grant
- Patent Title: Tunnel magneto-resistive (TMR) sensors employing TMR devices with different magnetic field sensitivities for increased detection sensitivity
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Application No.: US15474339Application Date: 2017-03-30
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Publication No.: US10534047B2Publication Date: 2020-01-14
- Inventor: Wei-Chuan Chen , Wah Nam Hsu , Xia Li , Seung Hyuk Kang , Nicholas Ka Ming Stevens-Yu
- Applicant: QUALCOMM Incorporated
- Applicant Address: US CA San Diego
- Assignee: QUALCOMM Incorporated
- Current Assignee: QUALCOMM Incorporated
- Current Assignee Address: US CA San Diego
- Agency: W&T/Qualcomm
- Main IPC: G01R33/09
- IPC: G01R33/09 ; H01L43/08 ; H01L27/22 ; G01R33/12

Abstract:
Tunnel magneto-resistive (TMR) sensors employing TMR devices with different magnetic field sensitivities for increased detection sensitivity are disclosed. For example, a TMR sensor may be used as a biosensor to detect the presence of biological materials. In aspects disclosed herein, free layers of at least two TMR devices in a TMR sensor are fabricated to exhibit different magnetic properties from each other (e.g., MR ratio, magnetic anisotropy, coercivity) so that each TMR device will exhibit a different change in resistance to a given magnetic stray field for increased magnetic field detection sensitivity. For example, the TMR devices may be fabricated to exhibit different magnetic properties such that one TMR device exhibits a greater change in resistance in the presence of a smaller magnetic stray field, and another TMR device exhibits a greater change in resistance in the presence of a larger magnetic stray field.
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